传感技术学报
傳感技術學報
전감기술학보
Journal of Transduction Technology
2013年
6期
815-819
,共5页
孙权%姚素英%徐江涛%徐超%张冬苓
孫權%姚素英%徐江濤%徐超%張鼕苓
손권%요소영%서강도%서초%장동령
微电子学与固体电子学%四管像素%满阱容量%CMOS图像传感器%光电二极管电容%防穿通注入
微電子學與固體電子學%四管像素%滿阱容量%CMOS圖像傳感器%光電二極管電容%防穿通註入
미전자학여고체전자학%사관상소%만정용량%CMOS도상전감기%광전이겁관전용%방천통주입
microelectronics and solid electronics%four-transistor pixel%full well capacity%CMOS image sensor%photo-diode capacity%anti-punch through
在分析光电二极管电容、浮空节点电容以及电荷转移效果这三方面影响满阱容量的基础上,着重讨论了最重要的光电二极管电容对满阱容量的影响,建立了满阱容量的计算模型。将测试结果与模型公式进行拟合,可以预估像素的满阱容量,指导像素设计。为了提高四管像素的满阱容量,提出在钳位光电二极管与浮空节点之间增加P型注入层稳定阱容量的方法。增加P型注入层可以大幅减小积分时间内光电二极管中储存的光生电子向浮空节点方向的泄漏,从而有效稳定阱容量。测试结果表明,在多种工艺条件下,像素的满阱容量从基本可以忽略提升至十万个电子的量级。
在分析光電二極管電容、浮空節點電容以及電荷轉移效果這三方麵影響滿阱容量的基礎上,著重討論瞭最重要的光電二極管電容對滿阱容量的影響,建立瞭滿阱容量的計算模型。將測試結果與模型公式進行擬閤,可以預估像素的滿阱容量,指導像素設計。為瞭提高四管像素的滿阱容量,提齣在鉗位光電二極管與浮空節點之間增加P型註入層穩定阱容量的方法。增加P型註入層可以大幅減小積分時間內光電二極管中儲存的光生電子嚮浮空節點方嚮的洩漏,從而有效穩定阱容量。測試結果錶明,在多種工藝條件下,像素的滿阱容量從基本可以忽略提升至十萬箇電子的量級。
재분석광전이겁관전용、부공절점전용이급전하전이효과저삼방면영향만정용량적기출상,착중토론료최중요적광전이겁관전용대만정용량적영향,건립료만정용량적계산모형。장측시결과여모형공식진행의합,가이예고상소적만정용량,지도상소설계。위료제고사관상소적만정용량,제출재겸위광전이겁관여부공절점지간증가P형주입층은정정용량적방법。증가P형주입층가이대폭감소적분시간내광전이겁관중저존적광생전자향부공절점방향적설루,종이유효은정정용량。측시결과표명,재다충공예조건하,상소적만정용량종기본가이홀략제승지십만개전자적량급。
The influences of floating node capacitance,charge transfer effects and the photodiode capacitance on full well capacity( FWC) are analyzed. Moreover,the effect of photodiode capacitance was discussed intensively and a computational model of the FWC is established. Experimental results were used for fitting the computational model, which is useful to estimate the FWC and instructive to pixel design. In order to increase the full well capacity of four-transistor pixel,a p-type injection layer is added between the pinned photo-diode and floating node to stabilize the FWC. Adding the p-type injection layer can significantly reduce the leakage of photo-generated electrons from the photodiode potential well to the floating node in the integration time. The test results show that FWC can be increased from almost zero to one hundred thousand electrons under different process conditions.