CAJ | 학술논문

为了解决大口径光学平面镜的子孔径拼接检测问题，基于三角剖分算法与最小二乘拟合算法，建立了一套合理的拼接算法和数学模型，编制了拼接程序，并结合工程实例，利用600 mm干涉仪实现了对612 mm×180 mm圆角矩型平面镜的拼接测量。检测中，基于靶标确定子孔径间的相对位置，完成子孔径间的对准，并且基于不同的镜体位置，对拼接检测的重复性进行了多次实验验证。实验结果表明：拼接结果无“拼痕”，并且两次基于不同镜体位置计算获取的拼接面形PV与RMS的相对偏差分别为2.07%与0.52%，拼接面形是一致的，验证了检测的可靠性和准确性。
위료해결대구경광학평면경적자공경병접검측문제，기우삼각부분산법여최소이승의합산법，건립료일투합리적병접산법화수학모형，편제료병접정서，병결합공정실례，이용600 mm간섭의실현료대612 mm×180 mm원각구형평면경적병접측량。검측중，기우파표학정자공경간적상대위치，완성자공경간적대준，병차기우불동적경체위치，대병접검측적중복성진행료다차실험험증。실험결과표명：병접결과무“병흔”，병차량차기우불동경체위치계산획취적병접면형PV여RMS적상대편차분별위2.07%여0.52%，병접면형시일치적，험증료검측적가고성화준학성。
In order to solve stitching testing problem of large-diameter optical flat mirror, based on triangulation and least squares fitting, a reasonable stitching algorithms and mathematical models were established and relative program was written. With engineering examples, a rounded rectangle plane mirror of 612 mmí180 mm was stitching measured with a 600 mm interferometer. In the testing, the relative position between the sub-apertures was determined based on the target, completing the alignment between the sub-apertures, and based on different mirror locations, the repeatability of stitching testing was verified with several experiments. The experimental results show that there is no “trace” in the stitching result and the relative deviation of the PV and RMS between the two experiments based on different mirror location are 2.07% and 0.52%. The stitching result is consistent and the reliability and accuracy of the stitching testing are verified.