CAJ | 학술논문

为了提高毛细管放电类氖氩46.9 nm软X射线激光的强度，研究了工作介质中气体的掺杂对激光强度的影响。研究表明，在纯Ar中掺入适量的He显著地提高了激光的输出强度。通过对比在Ar中掺入Ne、N2以及Kr等其他气体的实验，系统地分析了He的掺入对等离子温度的影响，找到了在特定工作气压下最佳的掺杂比，有利于进一步提高毛细管放电46.9 nm软X射线激光的强度。在放电等离子体极紫外光刻(EUVL)光源研究过程中，也采用了在Xe中掺入适量He的方式以提高13.5 nm的输出强度。
위료제고모세관방전류내아46.9 nm연X사선격광적강도，연구료공작개질중기체적참잡대격광강도적영향。연구표명，재순Ar중참입괄량적He현저지제고료격광적수출강도。통과대비재Ar중참입Ne、N2이급Kr등기타기체적실험，계통지분석료He적참입대등리자온도적영향，조도료재특정공작기압하최가적참잡비，유리우진일보제고모세관방전46.9 nm연X사선격광적강도。재방전등리자체겁자외광각(EUVL)광원연구과정중，야채용료재Xe중참입괄량He적방식이제고13.5 nm적수출강도。
The observation of the capillary discharge-pumped Ne-like Ar 46.9 nm soft X-ray laser output was reported under the condition of pure Ar and gaseous mixture of Ar-He, Ar-Ne, Ar-N2 and Ar-Kr. Mixing Ar with an appropriate quantity of He, the laser output was enhanced evidently, and there was an optimum ratio of He in the gaseous mixture of Ar-He, which could be the best for laser output. The experimental results of Ar-Ne, Ar-N2 and Ar-Kr mixture show that Ne, N2 and Kr decrease the laser output. The source research of discharged produced plasma in extreme ultraviolet lithography also mixes an appropriate quantity of He, in order to enhance 13.5 nm.