CAJ | 학술논문

终端光学元件是惯性约束聚变(ICF)系统最重要的组成部分之一。文中针对ICF系统中终端光学元件损伤的高精度、高效率检测问题，对光学元件损伤在线检测技术进行了研究，以“神光-III原型装置”终端光学元件为检测对象设计了光学元件损伤在线检测系统。针对终端光学元件的排布特点及其检测要求，利用CODEV软件设计了高分辨率变焦距望远光学系统；根据终端光学元件在靶室中的分布位置，设计了相应的对准及定位系统，实现了对球体空间排布的大尺寸光学元件组的远距离、高精度、实时快速检测。模拟ICF靶场环境进行了离线仿真实验，实验表明：系统的MTF曲线在68 lp/mm大于0.4,80%能量分布在2×2像元内。在1.8~2.8 m的工作距离下，检测装置对300 mm×300 mm视场范围内60μm以上的损伤点可以通过图像处理方法进行分辨，160μm以上的损伤点可以进行精确测量；姿态调整系统各运动环节运行精度均优于13 arc sec，满足检测要求。
종단광학원건시관성약속취변(ICF)계통최중요적조성부분지일。문중침대ICF계통중종단광학원건손상적고정도、고효솔검측문제，대광학원건손상재선검측기술진행료연구，이“신광-III원형장치”종단광학원건위검측대상설계료광학원건손상재선검측계통。침대종단광학원건적배포특점급기검측요구，이용CODEV연건설계료고분변솔변초거망원광학계통；근거종단광학원건재파실중적분포위치，설계료상응적대준급정위계통，실현료대구체공간배포적대척촌광학원건조적원거리、고정도、실시쾌속검측。모의ICF파장배경진행료리선방진실험，실험표명：계통적MTF곡선재68 lp/mm대우0.4,80%능량분포재2×2상원내。재1.8~2.8 m적공작거리하，검측장치대300 mm×300 mm시장범위내60μm이상적손상점가이통과도상처리방법진행분변，160μm이상적손상점가이진행정학측량；자태조정계통각운동배절운행정도균우우13 arc sec，만족검측요구。
Final optics play an important role in Inertial Confinement Fusion (ICF) system. In this paper, the online inspection technology for final optics damage was studied in order to build a final optics damage online inspection system for "ShenGuang-Ⅲ (SG-Ⅲ) prototype device". According to the assignment of final optics in optical module, a zoom telescope optical system with high resolution was designed by CODEV to meet the testing requirement. Based on the assignment of optical modules in target chamber, the positioning mechanism was designed to focus and switch the beamlines and the optics accurately and rapidly. At last, an off-line simulation experiment based on "SG-Ⅲ" was carried out. The result shows that the MTF at the spatial frequency of 68 lp/mm is greater than 0.4, 80% of the energy is distributed within 2í2 CCD cells. Between 1.8 m to 2.8 m, the resolution of the optical detecting mechanism can reach 160μm. The defects can be tracked when their diameter is up to 60μm by image processing method. The precision of the positioning mechanism is better than 13 arc sec.