CAJ | 학술논문

采用溶胶凝胶法在白云母沿(001)方向的解理表面制备VO2/TiO2热致相变复合薄膜。利用X射线衍射仪(XRD)，X射线光电子能谱仪(XPS)，原子力显微镜(AFM)等手段分析了薄膜的微观结构和表面形貌，通过原位傅里叶变换红外光谱(in-situ FTIR)分析复合薄膜在不同温度下的红外透过率，研究其热致相变特性。结果表明，复合薄膜在云母解理面表面呈VO2(011)/TiO2(101)取向生长，表面致密平整。复合薄膜在金属-半导体相变前后表现出优异的光学开关效应，相变过程中的红外光(波长为4μm)透过率变化(△Tr)为75.5%；相变过程陡然，透过率变化率(-dTr/dT)达15.7%/℃，滞回温宽减小到8℃。
채용용효응효법재백운모연(001)방향적해리표면제비VO2/TiO2열치상변복합박막。이용X사선연사의(XRD)，X사선광전자능보의(XPS)，원자력현미경(AFM)등수단분석료박막적미관결구화표면형모，통과원위부리협변환홍외광보(in-situ FTIR)분석복합박막재불동온도하적홍외투과솔，연구기열치상변특성。결과표명，복합박막재운모해리면표면정VO2(011)/TiO2(101)취향생장，표면치밀평정。복합박막재금속-반도체상변전후표현출우이적광학개관효응，상변과정중적홍외광(파장위4μm)투과솔변화(△Tr)위75.5%；상변과정두연，투과솔변화솔(-dTr/dT)체15.7%/℃，체회온관감소도8℃。
The VO2/TiO2 films were fabricated by a sol-gel method on the(001) oriented cleavage surface of muscovite slices. The X-ray diffractometer(XRD), X-ray photoelectron spectroscopy(XPS) and atomic force microscopy (AFM) were used to investigate the microstructure and describe the morphology of the films. The infrared transmittance spectrums of the VO2/TiO2 films at different temperatures were determined by in-situ Fourier transform infrared spectroscopy (FTIR), and the spectrums were used to analyze the thermochromic properties of the VO2/TiO2 films. The results show that the composite films are preferred VO2 (011)/TiO2 (101) orientated on the muscovite substrate with compact structure and smooth surface. The VO2/TiO2 films exhibit a significant infrared optic switching of 75.5% at the wavelength of 4μm during the metal-semiconductor phase transition (MST) process. The phase transition process of the composite film is quite sharp with a dTr/dT of 15.7%/℃, and the hysteresis width of films decreases to 8℃.