CAJ | 학술논문

针对高反射曲面零件的三维形貌测量，提出基于迭代的光栅相位偏折测量方法，通过建立相位偏折信息与工件表面梯度和高度的对应关系，采用结合区域波前重构和路径积分的三维重建算法，由梯度恢复被测工件表面形貌。实验结果表明，该方法可实现对大面形或曲率较大的高反射曲面三维形貌的测量，测量范围达到150 mm×150 mm×20 mm，测量精度约为40μm。
침대고반사곡면령건적삼유형모측량，제출기우질대적광책상위편절측량방법，통과건립상위편절신식여공건표면제도화고도적대응관계，채용결합구역파전중구화로경적분적삼유중건산법，유제도회복피측공건표면형모。실험결과표명，해방법가실현대대면형혹곡솔교대적고반사곡면삼유형모적측량，측량범위체도150 mm×150 mm×20 mm，측량정도약위40μm。
To solve the requirement for the 3D shape measurement of specular surface, a novel method of phase deflectormetry based on iterative strategy is proposed. The corresponding relationship between the phase deflectormetry information and the gradient and height is established. The 3D reconstruction algorithm combined zonal wave-front reconstruction and path-integration is applied to recover the profile of the parts from the gradient information. Experimental results show that this method can be used to measure the 3D shape of sepcular surface with large topography or curvature. The measurement range is 150 mm×150 mm×20 mm and the measurement accuracy is about 40 μm.