CAJ | 학술논문

在分度运动控制系统中以 DMC2210控制卡为核心，采用光栅尺为分度运动反馈器件，实现了高精度的实时监测反馈。针对工作台“过冲”现象进行了两方面的分析优化：一方面，分析了步进电机减速方式对刻划效果的影响，通过分段减速初步改善了工作台“过冲”现象；另一方面，分析并模拟了弹簧(联接工作台和分度丝杠螺母)刚度对工作台“过冲”问题的影响，更换大刚度弹簧后，很大程度改善了工作台“过冲”现象。改进后对光栅刻线密度为79 g/mm的中阶梯光栅进行了多次刻划试验，计算的机器分度精度均在5 nm以内，选取其中一组较好的数据(机器分度精度为2.887 nm)与之前多次刻划试验中较好的一组数据(机器分度精度为7.759 nm)进行了比较，结果表明刻划机分度精度得到很大的提高。
재분도운동공제계통중이 DMC2210공제잡위핵심，채용광책척위분도운동반궤기건，실현료고정도적실시감측반궤。침대공작태“과충”현상진행료량방면적분석우화：일방면，분석료보진전궤감속방식대각화효과적영향，통과분단감속초보개선료공작태“과충”현상；령일방면，분석병모의료탄황(련접공작태화분도사강라모)강도대공작태“과충”문제적영향，경환대강도탄황후，흔대정도개선료공작태“과충”현상。개진후대광책각선밀도위79 g/mm적중계제광책진행료다차각화시험，계산적궤기분도정도균재5 nm이내，선취기중일조교호적수거(궤기분도정도위2.887 nm)여지전다차각화시험중교호적일조수거(궤기분도정도위7.759 nm)진행료비교，결과표명각화궤분도정도득도흔대적제고。
A high precision closed-loop control positioning system taking the DMC2210 card as a control core is designed, which uses linear encoder as feed-back component to realize the precise positioning of indexing movement. The analysis and optimization pointing to the phenomenon of workbench’s overshoot is carried out in two parts. One part, the relation between stepping motor’s deceleration and ruling precision is analyzed,and then the phenomenon of workbench’s overshoot is optimized preliminarily by the stepwise deceleration’s style. The other part, the influence of spring’s stiffness on workbench’s overshoot problem is analyzed and simulated. After the change for spring with stronger stiffness, the index error caused by workbench’s overshoot phenomenon is improved largely. After the improvements, extensive tests on ruling gratings with density of 79 g/mm are carried out. Experimental results indicate that the precision of the indexing movement at ruling echelle with 79 g/mm is controlled in 5nm.We select one of the better data (the indexing movement’s precision is 2.887 nm) after our improvement to compare with one of the better data (the indexing movement’s precision is 7.759 nm) in the previous tests. The result shows that the ruling engine’s indexing precision is significantly improved.