CAJ | 학술논문

为了减小MEMS陀螺仪的正交误差，进一步提高陀螺精度，在Simulink环境中对陀螺结构和测控系统进行了建模和仿真。首先在理想状态的陀螺结构模型基础上建立了包含机械热噪声、模态间耦合等非理想因素的结构模型，并给出了陀螺结构的相关设计参数。其次在陀螺结构模型上以自激振荡和AGC控制技术为基础设计了驱动回路，该回路可在短时间内将驱动幅度稳定在10μm，且驱动频率为4048 Hz（驱动模态的谐振频率）。然后分析了模态间耦合信号的作用方式并建立了正交校正和检测闭环力反馈回路，仿真结果显示，在全闭环状态下检测模态所受耦合力的幅度比未校正状态下降了5个数量级，等效输入角速度也从205(°)/s下降到了6.58(°)/h。最后对陀螺模型进行了整体测试，得到其标度因数和阈值分别为21.76 mV/(°)/s和0.002(°)/s。
위료감소MEMS타라의적정교오차，진일보제고타라정도，재Simulink배경중대타라결구화측공계통진행료건모화방진。수선재이상상태적타라결구모형기출상건립료포함궤계열조성、모태간우합등비이상인소적결구모형，병급출료타라결구적상관설계삼수。기차재타라결구모형상이자격진탕화AGC공제기술위기출설계료구동회로，해회로가재단시간내장구동폭도은정재10μm，차구동빈솔위4048 Hz（구동모태적해진빈솔）。연후분석료모태간우합신호적작용방식병건립료정교교정화검측폐배력반궤회로，방진결과현시，재전폐배상태하검측모태소수우합력적폭도비미교정상태하강료5개수량급，등효수입각속도야종205(°)/s하강도료6.58(°)/h。최후대타라모형진행료정체측시，득도기표도인수화역치분별위21.76 mV/(°)/s화0.002(°)/s。
The model of micro-electro-mechanical system (MEMS) gyroscope structure and monitor circuit is investigated and simulated in Simulink in order to decrease the quadrature error and enhance the gyroscope’s precision. Firstly, the model is established based on the ideal gyroscope’s model and some imperfect elements, such as the mechanical thermal noise, coupling signal between two modes, and then the parameters are proposed. After that, the close loop drive system is designed based on self-resonant and AGC technology, the amplitude and frequency of drive frame are stabilized at 10μm and 4048 Hz (drive mode’s resonant frequency) respectively within one second. Then, the quadrature error correction and sense force feedback rebalance loops are built. The simulation result indicates that, after correction, the coupling force’s amplitude is decreased by 105 times, and its equivalent input angular rate is reduced from 205 (°)/s to 6.58 (°)/h. Finally, the overall test is made which shows that the scale factor and the threshold value are 21.76 mV/(°)/s and 0.002 (°)/s.