CAJ | 학술논문

离子束加工时工件温升较高，由此会产生热应力和热变形，影响加工精度。基于实际抛光测试了离子束加工过程中工件表面温度场分布，利用ANSYS软件对工件热变形进行了仿真分析，采用均匀抛光的方法研究了热应力和热变形对工件面形精度的影响。研究结果显示：离子束抛光过程中工件的温度可能会升至200℃，工件总变形量最大可达30μm；工件装夹应力是热变形能否恢复的关键，当工件装夹应力较小时，热变形对加工精度影响很小。
리자속가공시공건온승교고，유차회산생열응력화열변형，영향가공정도。기우실제포광측시료리자속가공과정중공건표면온도장분포，이용ANSYS연건대공건열변형진행료방진분석，채용균균포광적방법연구료열응력화열변형대공건면형정도적영향。연구결과현시：리자속포광과정중공건적온도가능회승지200℃，공건총변형량최대가체30μm；공건장협응력시열변형능부회복적관건，당공건장협응력교소시，열변형대가공정도영향흔소。
The temperature of the workpiece in the Ion Beam Figuring ( IBF) is much high,that will generate thermal stress and hot deformation.Therefore,the thermal effect in the IBF is one of the most important factors to the polishing accuracy .The temper-ature field of the workpiece during the IBF process was tested in a practical experiment .Also the hot deformation of the workpiece was calculated in the ANSYS software .The effect of the thermal stress and hot deformation was also investigated in a practical u -niform polishing experiment .The study shows:the temperature may rise to 200℃ and the hot deformation may be 30μm.Clamp stress of the workpiece is key to the hot deformation after the polishing .When the clamping stress is much smaller ,it will hardly affect the polishing accuracy .