CAJ | 학술논문

提出了一种基于全石英结构的非本征F-P光纤干涉压力传感器，该传感器具有很高的压力灵敏特性。压力灵敏度为5.18nm/KPa (0.75nm/psi)，分辨率为38Pa (0.005psi)。由于激光加工的过程中在光纤与石英毛细管之间保留了通风孔，所有该传感器具有极低的温度敏感特性，约0.011nm/℃，与此相应的压力测量误差是0.021KPa/℃(0.003psi/℃)。由于通风孔的存在，传感器的工作点也不会随着背景压力的变化而漂移。因此，该传感器适用于液位测量、环境监测以及其他恶劣环境的工业应用。
제출료일충기우전석영결구적비본정F-P광섬간섭압력전감기，해전감기구유흔고적압력령민특성。압력령민도위5.18nm/KPa (0.75nm/psi)，분변솔위38Pa (0.005psi)。유우격광가공적과정중재광섬여석영모세관지간보류료통풍공，소유해전감기구유겁저적온도민감특성，약0.011nm/℃，여차상응적압력측량오차시0.021KPa/℃(0.003psi/℃)。유우통풍공적존재，전감기적공작점야불회수착배경압력적변화이표이。인차，해전감기괄용우액위측량、배경감측이급기타악렬배경적공업응용。
A novel high sensitivity pressure sensor based on all-fused-silica Extrinsic Fabry-Pérot optical fiber interferometer, which exhibits extreme low temperature dependence, has been developed. The sensor can excellently operate with a sensitivity of 5.18nm/KPa (0.75nm/psi), a resolution of 38Pa (0.005psi). Due to epoxy-free bonding and reserving a vent hole between the fiber and the ferrule in the process of laser heating fusion bonding, the temperature dependence is significantly reduced to the 0.011nm/℃, and pressure measurement error is 0.021KPa/℃ (0.003psi/℃). The operating point doesn’t shift with backpressure change due to the vent hole. The sensor may be suitable for liquid measurement, environmental monitoring and other industrial applications in harsh environment.