CAJ | 학술논문

本文提出一种金属栅线印刷位置的检测方法，适用于直接检测金属栅线印刷位置与选择性重扩散栅线印刷区的重合精度，可以实时在线检测栅线印刷位置精度并反馈偏差值，实现对位印刷的闭环控制。该检测方法同时也为采用图形识别技术和图形对位技术的选择性电极型晶硅太阳能电池丝网印刷设备提供了可直观衡量设备印刷精度的验证方法。此外，利用该检测方法可以实现对网板使用寿命的监测，提高网板和丝网印刷设备的使用率，降低生产成本，简化工艺控制。
본문제출일충금속책선인쇄위치적검측방법，괄용우직접검측금속책선인쇄위치여선택성중확산책선인쇄구적중합정도，가이실시재선검측책선인쇄위치정도병반궤편차치，실현대위인쇄적폐배공제。해검측방법동시야위채용도형식별기술화도형대위기술적선택성전겁형정규태양능전지사망인쇄설비제공료가직관형량설비인쇄정도적험증방법。차외，이용해검측방법가이실현대망판사용수명적감측，제고망판화사망인쇄설비적사용솔，강저생산성본，간화공예공제。
This paper provides a method for detecting metal gate line printing position,registration accuracy for direct detection of metal gate line printing position and selective diffusion grid line printing area,can print position accuracy of real-time online detection of the gate line and feedback the deviation values,to achieve closed-loop metal grating pattern alignment printing control.The detection method at the same time as the selective electrode type amorphous silicon solar cell screen printing equipment using pattern recognition techniques and pattern alignment technology provides verification method can directly measure equipment printing precision.In addition,the detection method can be achieved on the monitor screen service life,improve the use of screen and screen printing equipment rate,reduce production cost, simplify the process control.