CAJ | 학술논문

透明导电氧化物(TCO)同时具有良好的金属导电性和较高的可见光透过率，近年来在光电器件领域，特别是平板显示和薄膜太阳能电池上得到广泛的应用。其中In2O3基薄膜应用技术最为成熟。本文主要报道In2O3基薄膜的制备与退火处理的研究现状。
투명도전양화물(TCO)동시구유량호적금속도전성화교고적가견광투과솔，근년래재광전기건영역，특별시평판현시화박막태양능전지상득도엄범적응용。기중In2O3기박막응용기술최위성숙。본문주요보도In2O3기박막적제비여퇴화처리적연구현상。
The transparent conductive oxide (TCO) films have the combination of good metallic conductivity and high transmittance in the visible spectra, so these films were widely used in all types of flat panel displays and thin films solar cells. The well-known In2O3 based films are the most intense researched in nowadays. This paper reports the development of the producing technique and annealing properties in laboratories.