CAJ | 학술논문

通过仪器获得的凹面光栅的衍射效率是相对值，其测量值的精度受测量过程和补偿方法的影响。为使效率测量值的测量精度得到进一步提高，有必要对测量值产生影响的主要因素进行深入研究。该文进一步考察了影响衍射效率测量精度的主要因素，针对待测凹面光栅根据待测波长的测试要求进行旋转造成光束截面变化而产生的问题，适当补充原理性方案，并在此基础上推导出了适用于凹面光栅的光束截面变化因子 k（θ）的解析表达式。基于影响测量精度因素与理论值之间的非线性关系，提出采用二次非线性回归分析的方法对测量结果进行补偿，给出了提高衍射效率测量精度的补偿公式。实验结果表明，对光栅衍射效率的测量值进行进一步补偿后，使得补偿值与理论值之间的整体误差范围由±2.5％缩小为±0.3％以内，与线性回归分析方法相比，显著缩小了补偿值与理论值之间的差距，进一步保证了衍射效率的准确测量。将补偿过程嵌入测量程序，该方法能够实时补偿测量结果，满足仪器准确测量的要求。
통과의기획득적요면광책적연사효솔시상대치，기측량치적정도수측량과정화보상방법적영향。위사효솔측량치적측량정도득도진일보제고，유필요대측량치산생영향적주요인소진행심입연구。해문진일보고찰료영향연사효솔측량정도적주요인소，침대대측요면광책근거대측파장적측시요구진행선전조성광속절면변화이산생적문제，괄당보충원이성방안，병재차기출상추도출료괄용우요면광책적광속절면변화인자 k（θ）적해석표체식。기우영향측량정도인소여이론치지간적비선성관계，제출채용이차비선성회귀분석적방법대측량결과진행보상，급출료제고연사효솔측량정도적보상공식。실험결과표명，대광책연사효솔적측량치진행진일보보상후，사득보상치여이론치지간적정체오차범위유±2.5％축소위±0.3％이내，여선성회귀분석방법상비，현저축소료보상치여이론치지간적차거，진일보보증료연사효솔적준학측량。장보상과정감입측량정서，해방법능구실시보상측량결과，만족의기준학측량적요구。
The present paper aimed at the question that the beam cross-section changes according to the rotation of concave grat-ing during the measuring process ,and the appropriate supplement to the principle of the program was done .The appropriate supplement to the principle lay the foundation for the derivation of the beam cross-section k(θ) ,and the whole analytical expres-sion of changes factor of the beam cross-section k(θ) for concave grating was derived .Because of the relationship between the theoretical values and the factors which affect the diffraction efficiency measuring accuracy was nonlinear ,the quadratic nonlinear regression analysis was introduced and the compensating formula was established .The results show further correction to diffrac-tion efficiency measurements for concave grating ,the range of differences between the compensated values and the theoretical values was reduced from ± 2.5% to less than ± 0.3% ,compared with the linear regression analysis ,and the quadratic nonlin-ear regression analysis significantly reduces the variation between the compensated values and the theoretical values ,which fur-ther ensures the accurate measurement of the diffraction efficiency for concave gratings .The compensating process is embedded in the measurement program ;this method is strongly real-time ,which can satisfy the requirements of simple operation ,testing speediness and preciseness .