CAJ | 학술논문

采用离子辅助增强磁控溅射与离子蒸发镀二元组合源设备在高速钢基体沉积出微量 Al 掺杂的TiN涂层(Al-TiN),利用扫描电子显微镜、X射线衍射仪、显微硬度计对涂层的组成成分、相结构、膜基结合力及显微硬度进行了分析；用摩擦磨损实验机及台阶仪分析了薄膜的摩擦磨损性能。研究了微量 Al 掺杂对薄膜的微结构及性能的影响。结果表明,TiN 涂层中微量Al的存在使涂层的膜基结合力、耐摩擦磨损性能得到明显改善。
채용리자보조증강자공천사여리자증발도이원조합원설비재고속강기체침적출미량 Al 참잡적TiN도층(Al-TiN),이용소묘전자현미경、X사선연사의、현미경도계대도층적조성성분、상결구、막기결합력급현미경도진행료분석；용마찰마손실험궤급태계의분석료박막적마찰마손성능。연구료미량 Al 참잡대박막적미결구급성능적영향。결과표명,TiN 도층중미량Al적존재사도층적막기결합력、내마찰마손성능득도명현개선。
Al-TiN coating deposited on high speed steel by plasma enhanced magnetron sputtering ion plating and evaporating deposition combination sources equipment.Study on the effect of little Al doped on the micro-structure and mechanical properties of TiN coating.The elements,phase structure,film-substrate cohesion and microhardness were characterized by scanning electron microscopy (SEM),X-ray diffraction (XRD),micro-hardness meter;the wear resistance was investigated with CSEM pin-on-disk wear test apparatus and step profi-ler.The results show that the addition of little Al make the film-substrate cohesion and wear resistance are evi-dently improved.