真空
真空
진공
VACUUM
2014年
3期
44-48
,共5页
ITO薄膜%方块电阻%双电测四探针法%标准样片
ITO薄膜%方塊電阻%雙電測四探針法%標準樣片
ITO박막%방괴전조%쌍전측사탐침법%표준양편
ITO film%sheet resistance%dual-configuration four-point probe method%standard sample wafer
针对ITO薄膜方块电阻测试方法，文章探讨了常规的四探针法与双电测四探针法在实际生产中的适应性、准确性。根据玻璃基板上的 ITO薄膜和聚脂薄膜上的ITO薄膜的结构、物理特性不同特点，测试方块电阻时应注意的细节作出了必要的阐述。并对生产中有关方块电阻测试的注意事项作出详细说明。
針對ITO薄膜方塊電阻測試方法，文章探討瞭常規的四探針法與雙電測四探針法在實際生產中的適應性、準確性。根據玻璃基闆上的 ITO薄膜和聚脂薄膜上的ITO薄膜的結構、物理特性不同特點，測試方塊電阻時應註意的細節作齣瞭必要的闡述。併對生產中有關方塊電阻測試的註意事項作齣詳細說明。
침대ITO박막방괴전조측시방법，문장탐토료상규적사탐침법여쌍전측사탐침법재실제생산중적괄응성、준학성。근거파리기판상적 ITO박막화취지박막상적ITO박막적결구、물리특성불동특점，측시방괴전조시응주의적세절작출료필요적천술。병대생산중유관방괴전조측시적주의사항작출상세설명。
For the testing method of ITO film sheet resistance , the article discusses the adaptability and accuracy of regular four-point probe testing method and dual-configuration four-point probe testing method in actual production and makes necessary elaboration for details at the time of testing sheet resistance according to different characteristics of structure and physical property of ITO film on glass substrate and polyester film. And detailed description for considerations for testing of sheet resistance during production was made at the same time.
