CAJ | 학술논문

采用磁控溅射法在Ar+N2的混合气氛中制备FeCoAlN薄膜，并对其进行磁场真空热处理，以研究薄膜的结构、磁性及热稳定性。当N2与(N2+Ar)的流量比为9%时制备的薄膜具有良好的软磁性能。随着Al含量的增加，薄膜的热稳定性明显得到改善。Al 含量为13.5%的(Fe64.8Co35.2)AlN 薄膜在400℃真空磁场热处理60min，仍然具有良好的软磁性能，其饱和磁化强度μ0Ms为1.2T，易轴矫顽力为0.68kA/m，各向异性场为2.8 kA/m。
채용자공천사법재Ar+N2적혼합기분중제비FeCoAlN박막，병대기진행자장진공열처리，이연구박막적결구、자성급열은정성。당N2여(N2+Ar)적류량비위9%시제비적박막구유량호적연자성능。수착Al함량적증가，박막적열은정성명현득도개선。Al 함량위13.5%적(Fe64.8Co35.2)AlN 박막재400℃진공자장열처리60min，잉연구유량호적연자성능，기포화자화강도μ0Ms위1.2T，역축교완력위0.68kA/m，각향이성장위2.8 kA/m。
FeCoAlN films were prepared by reactive radio frequency magnetron co-sputtering technique in mixture atmosphere of argon and nitrogen, followed by magnetic vacuum annealing, and their microstructure, magnetic properties and thermal stability were investigated. The FeCoAlN films deposited at N2/(Ar+ N2) gas flux percentage of 9% have good soft magnetic properties. The magnetic thermal stability of the FeCoN films can be obviously improved with increasing Al content. The (Fe64.8Co35.2)86.5Al13.5N films annealed at 400℃ for 60 min exhibit good magnetic soft properties with a saturation magnetization (μ0Ms)of 1.21 T, an easy axis coercive field (Hce) of 0.68kA/m, and an anisotropy field (Hk) of 2.8 kA/m.