CAJ | 학술논문

干涉检测作为高精度光学面形加工的基础，其检测精度决定了加工精度。为了解决大口径光学平面反射镜检测问题，基于子孔径拼接算法，提出了一种拼接因子用于重叠区域取值，同时利用Φ100 mm口径干涉仪对Φ120 mm口径平面反射镜完成拼接检验，并将拼接检测结果与利用Φ150 mm口径干涉仪直接检测结果进行了对比分析，实验结果表明，拼接结果无“拼痕”，拼接检测结果与全口径测量结果PV与RMS的相对偏差分别为7.25%与7.14%，检测面形是一致的，由此验证了拼接检测的可靠性和准确性。
간섭검측작위고정도광학면형가공적기출，기검측정도결정료가공정도。위료해결대구경광학평면반사경검측문제，기우자공경병접산법，제출료일충병접인자용우중첩구역취치，동시이용Φ100 mm구경간섭의대Φ120 mm구경평면반사경완성병접검험，병장병접검측결과여이용Φ150 mm구경간섭의직접검측결과진행료대비분석，실험결과표명，병접결과무“병흔”，병접검측결과여전구경측량결과PV여RMS적상대편차분별위7.25%여7.14%，검측면형시일치적，유차험증료병접검측적가고성화준학성。
As the fundamental factor of high precision optical producing, the testing accuracy of interferometry is the key of producing accuracy. In order to solve the problem of large optical flat mirror testing, a kind of stitching factor was provided for overlapped area values, based on the stitching algorithm. At the meantime, the stitching measurement was completed for a Φ120 mm flat mirror with aΦ100 mm interferometer. Comparing the stitching result with the full aperture testing result with a Φ150 mm interferometer, it turns out that the stitching result is smooth and the relative deviation of PV and RMS between the stitching result and the full aperture testing result is 7.25% and 7.14% respectively. The testing result is consistent, verifying the reliability and accuracy of the stitching testing.