CAJ | 학술논문

提出了一种用衍射微透镜阵列对半导体激光光束进行匀化的方法，解决了折射型微透镜阵列难于实现高填充因子、高精度面型的难题。基于标量衍射理论，设计了具有多阶相位结构的衍射微透镜阵列。采用菲涅耳衍射公式，推导了半导体激光从输入面到输出面的光场计算公式。数值模拟了成像型微透镜阵列匀化系统，并研究了微透镜口径及相位台阶数对焦斑均匀性的影响。结果表明：当衍射微透镜的口径D=0.27 mm、相位台阶数L=16时，可获得不均匀性约为±5%、系统能量可利用率达97%的均匀焦斑。
제출료일충용연사미투경진렬대반도체격광광속진행균화적방법，해결료절사형미투경진렬난우실현고전충인자、고정도면형적난제。기우표량연사이론，설계료구유다계상위결구적연사미투경진렬。채용비열이연사공식，추도료반도체격광종수입면도수출면적광장계산공식。수치모의료성상형미투경진렬균화계통，병연구료미투경구경급상위태계수대초반균균성적영향。결과표명：당연사미투경적구경D=0.27 mm、상위태계수L=16시，가획득불균균성약위±5%、계통능량가이용솔체97%적균균초반。
In order to solve the problem that the high fill factor and accuracy of the refractive lens are difficult to realized , a new approach for homogenization of semiconductor laser by using diffractive micro-lens array was proposed . And diffractive micro-lens array with phase steps based on the theory of scalar diffraction was designed . The equation of intensity distribution in the focal plane was derived by the Fresnel diffraction equation . The imaging homogeneous system of diffractive micro lens array was simulated and the influences of diameter and phase steps of diffractive micro-lens on the intensity distribution were studied . The results show that the non-homogeneity about ± 5% and energy efficiency over 97% of the focal speck can be achieved with micro-lens diameter of 0 . 27 mm and phase steps of 16 .