CAJ | 학술논문

扫描电镜是研究微观结构的一种常用的科研手段，但由于荷电效应、边缘效应、样品损伤等原因，易生成低质量的电镜图像，从而影响对样品的分析。总结了低质量图像的规律，针对扫描电镜图像的特点设计了适合的增强算法，提高了图像的质量，并进一步设计了勾勒样品边缘的方法，拓展了电镜图像分析功能。基于 SoPC 技术的嵌入式平台，实现了整个电镜图像处理流程。 DEII 开发板实验表明，提出的方法可有效提高低质量电镜图片的质量，给科研工作者提供了一种更准确、轻松的从扫描电镜图像中获取所需信息的途径。
소묘전경시연구미관결구적일충상용적과연수단，단유우하전효응、변연효응、양품손상등원인，역생성저질량적전경도상，종이영향대양품적분석。총결료저질량도상적규률，침대소묘전경도상적특점설계료괄합적증강산법，제고료도상적질량，병진일보설계료구륵양품변연적방법，탁전료전경도상분석공능。기우 SoPC 기술적감입식평태，실현료정개전경도상처리류정。 DEII 개발판실험표명，제출적방법가유효제고저질량전경도편적질량，급과연공작자제공료일충경준학、경송적종소묘전경도상중획취소수신식적도경。
Scanning electron microscope ( SEM ) is a widely used tool on micro structure research . Because of charged effect , edge effect and sample injury , low quality SEM pictures are often got , which weaken the analysis of samples . In this paper , the reason of low quality picture and its character are studied . Based on them , a specific enhancement algorithm for low quality SEM pic-tures is designed, which increases SEM pictures′ quality. Besides that, edges of samples in picture are detected, which improves SEM′s function . The whole process is implemented in an SoPC platform . The experiments on DEII show that our method can improve SEM picture′s quality obviously . It provides researchers a novel way of extracting information from SEM picture accurately and easily .