CAJ | 학술논문

利用磁控溅射方法在 Cu 基底上成功制备出大面积多层石墨烯薄膜，利用扫描电镜、原子力显微镜、拉曼光谱等对其结构和性能进行了表征，结果表明这些薄膜具有多层石墨烯结构。利用原子力显微镜对其摩擦性能进行表征，发现其微观摩擦性能与石墨烯层数密切相关。
이용자공천사방법재 Cu 기저상성공제비출대면적다층석묵희박막，이용소묘전경、원자력현미경、랍만광보등대기결구화성능진행료표정，결과표명저사박막구유다층석묵희결구。이용원자력현미경대기마찰성능진행표정，발현기미관마찰성능여석묵희층수밀절상관。
Large-scale and multi-layer graphene were fabricated by magnetron sputtering method on Cu sub-strates.The structure and morphology were characterized by SEM,AFM and Raman spectrum et al.The result revealed that there are many-layer structures contained in these graphene films.The micro tribological proper-ties were characterized by AFM and they were tightly relating with layer numbers of graphene.