CAJ | 학술논문

以二氧化钛（ TiO2）掺杂的氧化锌（ ZTO）陶瓷靶作为溅射源材料，采用射频磁控溅射工艺在玻璃衬底上沉积了ZTO半导体薄膜，利用可见-紫外光分光光度计、四探针仪测试以及多种光学表征方法，研究了陶瓷靶中TiO2含量对ZTO薄膜光学性质和光电综合性能的影响．实验结果表明：ZTO薄膜的折射率表现为正常的色散特性，其色散行为遵循有效单振子模型．TiO2含量对ZTO薄膜的电阻率、透过率、折射率、消光系数和光学带隙等具有不同程度的影响，当TiO2的质量分数为3％时，ZTO薄膜的电阻率最低、可见光平均透过率最高、光电综合性能最好．
이이양화태（ TiO2）참잡적양화자（ ZTO）도자파작위천사원재료，채용사빈자공천사공예재파리츤저상침적료ZTO반도체박막，이용가견-자외광분광광도계、사탐침의측시이급다충광학표정방법，연구료도자파중TiO2함량대ZTO박막광학성질화광전종합성능적영향．실험결과표명：ZTO박막적절사솔표현위정상적색산특성，기색산행위준순유효단진자모형．TiO2함량대ZTO박막적전조솔、투과솔、절사솔、소광계수화광학대극등구유불동정도적영향，당TiO2적질량분수위3％시，ZTO박막적전조솔최저、가견광평균투과솔최고、광전종합성능최호．
Transparent conducting TiO 2-doped zinc oxide ( ZTO ) thin films were deposited by radio-frequency magnetron sputtering method using the ceramic target fabricated by sintering the mixture of TiO 2 and ZnO nanometer powder .The influence of TiO 2 content on optical and electrical properties of the ZTO thin films was investigated by four -point probe , UV-visible spectrophotometer and optical characterization methods .The results demonstrate that the deposited thin films possess the normal dispersion characteristics in visible region .The dispersion relation of the refractive index can be well explained by the single-effective-oscillator model .The electrical resistivity , optical transmittance , refractive index , extinction coefficient and optical band gap of the deposited films are closely related to the TiO 2 content.With the mass fraction of 3% of TiO2 doping , the ZTO thin film has the lowest electrical resistivity , the highest average visible transmittance and the maximum figure of merit .