CAJ | 학술논문

硅化铂红外焦平面探测器具有响应光谱宽、规模大、均匀性好、时间稳定性高、制造成本低等优点，在多/宽光谱成像、激光探测、天文观测、医疗检测等领域具有应用潜力，但NETD 100 mK的灵敏度对其广泛应用有一定的限制。文中从该探测器的量子效率和填充因子两方面总结和分析了国内外的改进技术，重点分析了光腔结构、多孔硅结构、重掺杂P+和合适硅化铂膜厚提高量子效率的机理，并定量比较了提升幅度：多孔硅结构提升幅度最大，在波长4μm处的量子效率可达27%；相比内线转移CCD，电荷扫描器件、曲流沟道CCD和混合读出结构均能改善填充因子，其中混合读出结构的填充因子可提高为80%。微透镜列阵能将填充因子提高到85%以上。
규화박홍외초평면탐측기구유향응광보관、규모대、균균성호、시간은정성고、제조성본저등우점，재다/관광보성상、격광탐측、천문관측、의료검측등영역구유응용잠력，단NETD 100 mK적령민도대기엄범응용유일정적한제。문중종해탐측기적양자효솔화전충인자량방면총결화분석료국내외적개진기술，중점분석료광강결구、다공규결구、중참잡P+화합괄규화박막후제고양자효솔적궤리，병정량비교료제승폭도：다공규결구제승폭도최대，재파장4μm처적양자효솔가체27%；상비내선전이CCD，전하소묘기건、곡류구도CCD화혼합독출결구균능개선전충인자，기중혼합독출결구적전충인자가제고위80%。미투경렬진능장전충인자제고도85%이상。
Platinum silicide infrared focal plane array is characterized by several advantages such as wide spectral range, large array, good uniformity, high time stability and low cost. It shows application potential in multispectral/wide-spectrum imaging, laser detection, astronomical observation and medical monitor. However, 100 mK′s sensitivity(NETD) is the main limitation on wide application. The technologies of improving performance of platinum silicide infrared detector were summarized. Optical cavity structure, PtSi/porous Si schottky barrier, doping-spike P+ and suitable PtSi film thickness were effective measures to increase quantum efficiency. Porous silicon structure improved quantum efficiency as much as 27% at 4μm wavelength. Comparing with interline transfer CCD, the fill factor of the FPAs was raised up to 50%-80% using charge sweep device, meander channel CCD or hybrid schottky structure. In addition,microlens array was the most efficient method to augment the fill factor higher than 85%.