CAJ | 학술논문

微小型化是红外焦平面探测器发展的必然趋势，微小型化将使目前焦平面阵列存在的占空比小、光能利用率低的问题体现的更加明显，针对这一状况，提出一种利用分子间引力的光胶技术将矩形孔径球面微透镜阵列集成于红外焦平面之中。采用几何光学理论分析了微透镜阵列的聚能效应，设计并制作“栅线”和“方孔”双对准标记，采用衍射光栅同轴对准方法使两种器件的对准精度达到0.1?m。对集成前后红外焦平面阵列性能进行测试，发现响应率提高了近40%，探测率提高了约20%，红外焦平面的噪声从758.89?V下降到668.23?V。最终得到结论：光胶法用于两种器件的集成具有耐温性好、变形小、强度高等优点，集成后红外焦平面的探测性能显著提高，有利于探测器微小型化发展。
미소형화시홍외초평면탐측기발전적필연추세，미소형화장사목전초평면진렬존재적점공비소、광능이용솔저적문제체현적경가명현，침대저일상황，제출일충이용분자간인력적광효기술장구형공경구면미투경진렬집성우홍외초평면지중。채용궤하광학이론분석료미투경진렬적취능효응，설계병제작“책선”화“방공”쌍대준표기，채용연사광책동축대준방법사량충기건적대준정도체도0.1?m。대집성전후홍외초평면진렬성능진행측시，발현향응솔제고료근40%，탐측솔제고료약20%，홍외초평면적조성종758.89?V하강도668.23?V。최종득도결론：광효법용우량충기건적집성구유내온성호、변형소、강도고등우점，집성후홍외초평면적탐측성능현저제고，유리우탐측기미소형화발전。
According to the problem of small duty cycle and low light energy utilization in infrared focal plane, an optical cement technology is putted forward that integrated square aperture spherical micro-lens arrays and infrared focal plane. Micro-lens arrays cumulative effect is analysed theoretically in this paper.“grating line”and“cross”double alignment marks are designed. Alignment micro-lens arrays and infrared focal plane by diffraction grating coaxial alignment method, We find that responsivity improved 40%, detectivity improved 20%. Noise decreased from 758.89?V to 668.23?V by comparison of pre integration. And show that There are many advantages of temperature resistance, small deformation etc, detection performance improved significantly, helpful to the develop of detector Microminiaturization.