CAJ | 학술논문

现代科学技术已经发展到利用单个光子的量子态载运信息和进行计算。因此,高效、灵敏地探测单个光子是量子计量、量子通信、非线性光学等量子信息科学研究中最基础的技术之一。超导纳米线单光子探测器(SNSPD)是一种新型单光子检测器,具有暗计数低、探测速率高、检测频谱宽等优点,在众多领域存在潜在应用。本文概述了超导单光子探测器的工作机制和理论模型,重点介绍了兼容4 inch硅工艺的 SNSPD器件的关键技术工艺,如器件设计、材料结构、制备工艺和封装技术等。研制的超导单光子探测器,在1550 nm波段,系统的单光子检测效率最高达到75%,暗计数小于100 cps,与国际最好水平相当。在不断提高 SNSPD性能研究的同时,还开展了利用 SNSPD进行光子数分辨的研究,以及将其应用于光时域反射仪(OTDR)中,进行长距离光纤状态的分析和检测研究。
현대과학기술이경발전도이용단개광자적양자태재운신식화진행계산。인차,고효、령민지탐측단개광자시양자계량、양자통신、비선성광학등양자신식과학연구중최기출적기술지일。초도납미선단광자탐측기(SNSPD)시일충신형단광자검측기,구유암계수저、탐측속솔고、검측빈보관등우점,재음다영역존재잠재응용。본문개술료초도단광자탐측기적공작궤제화이론모형,중점개소료겸용4 inch규공예적 SNSPD기건적관건기술공예,여기건설계、재료결구、제비공예화봉장기술등。연제적초도단광자탐측기,재1550 nm파단,계통적단광자검측효솔최고체도75%,암계수소우100 cps,여국제최호수평상당。재불단제고 SNSPD성능연구적동시,환개전료이용 SNSPD진행광자수분변적연구,이급장기응용우광시역반사의(OTDR)중,진행장거리광섬상태적분석화검측연구。
Superconductor nanowire single-photon detector (SNSPD)is a new single-photon detector with low dark count rate.This article analyzed the working mechanism and theoretical models of SNSPD.We outlined the fabrication process with 4 inches wafer compatible with standard silicon process,such as device design,materials deposition,fabrication process and packaging technology.High performance SNSPD was fabricated with system efficiency up to 75% in 1550 nm band and dark count less than 100 cps.We also carried out the research of resolving photon number and the application of SNSPD to the optical domain reflectmeter(OTDR).