现代制造工程
現代製造工程
현대제조공정
MODERN MANUFACTURING ENGINEERING
2013年
8期
68-71
,共4页
频率混叠%超声换能器%引线焊接%灵敏度分析
頻率混疊%超聲換能器%引線銲接%靈敏度分析
빈솔혼첩%초성환능기%인선한접%령민도분석
frequency alias%ultrasonic transducer%wire bonding%sensitivity analysis
随着芯片引脚间距的减小以及芯片焊接温度的降低，更高频率的超声波换能器在芯片封装行业中有着广泛的应用前景。通过有限元分析软件ANSYS10．0建立了工作频率为133 kHz的超声换能器的有限元模型，研究其工作频率附近振动模态特性，结果表明，超声换能器易产生频率混叠现象，导致焊接质量下降。采用频率灵敏度分析法对换能器结构参数进行优化，使工作模态频率与非工作模态频率的最小间隔由0．7kHz增加到4．6kHz，有效地抑制了频率混叠。使用安捷伦阻抗分析仪对加工的超声换能器的阻抗特性进行测试，仿真结果与测试结果能够很好地吻合。
隨著芯片引腳間距的減小以及芯片銲接溫度的降低，更高頻率的超聲波換能器在芯片封裝行業中有著廣汎的應用前景。通過有限元分析軟件ANSYS10．0建立瞭工作頻率為133 kHz的超聲換能器的有限元模型，研究其工作頻率附近振動模態特性，結果錶明，超聲換能器易產生頻率混疊現象，導緻銲接質量下降。採用頻率靈敏度分析法對換能器結構參數進行優化，使工作模態頻率與非工作模態頻率的最小間隔由0．7kHz增加到4．6kHz，有效地抑製瞭頻率混疊。使用安捷倫阻抗分析儀對加工的超聲換能器的阻抗特性進行測試，倣真結果與測試結果能夠很好地吻閤。
수착심편인각간거적감소이급심편한접온도적강저，경고빈솔적초성파환능기재심편봉장행업중유착엄범적응용전경。통과유한원분석연건ANSYS10．0건립료공작빈솔위133 kHz적초성환능기적유한원모형，연구기공작빈솔부근진동모태특성，결과표명，초성환능기역산생빈솔혼첩현상，도치한접질량하강。채용빈솔령민도분석법대환능기결구삼수진행우화，사공작모태빈솔여비공작모태빈솔적최소간격유0．7kHz증가도4．6kHz，유효지억제료빈솔혼첩。사용안첩륜조항분석의대가공적초성환능기적조항특성진행측시，방진결과여측시결과능구흔호지문합。
The decrease of the pin pitch and the reduction of the bonding temperature urgently demand higher frequency ultrasonic transducer.The Finite Element Model (FEM) of the ultrasonic transducer working at 135kHz was built by the commercial soft-ware ANSYS10.0.The vibrating modes near the working frequency were investigated .Closely to the working mode ,there were some un-wanted modes that could be easily excited and would have a great effect on the bonding quality .The size of the transduc-er was optimized based on sensitivity analysis ,and the minimum interval of the frequencies between the working mode and the un -wanted modes was increased from 0.7kHz to 4.6kHz,which effectively inhibited the frequency aliasing .At last,the impedance characteristics of the transducer were tested using an impedance analyzer ,and the simulation results agreed well with the meas-ured ones.
