CAJ | 학술논문

本文主要介绍了晶圆加工中的几何参数的纳米精度在线测量的原理、方法和测量仪器研究。针对化学机械抛光（ CMP ）中晶圆表面的金属膜厚的高精度快速在线和离线检测技术的要求，通过数值模拟和理论分析，研究了涡流传感器的参数对其灵敏度的影响规律，得到了提高灵敏度的新方法；实验验证了一种减小提离高度对膜厚测量精度影响的测量方法的有效性，并设计开发了快速多频测试系统；设计了电涡流在线和离线检测系统，并成功应用于国家重大专项项目“超低下压力化学机械抛光装备样机”中，实现了用电涡流方法进行全自动、快速、多模式、大提离条件下的晶圆金属膜厚度纳米级分辨率在线测量和晶圆抛光后铜膜厚度离线全局测量。
본문주요개소료정원가공중적궤하삼수적납미정도재선측량적원리、방법화측량의기연구。침대화학궤계포광（ CMP ）중정원표면적금속막후적고정도쾌속재선화리선검측기술적요구，통과수치모의화이론분석，연구료와류전감기적삼수대기령민도적영향규률，득도료제고령민도적신방법；실험험증료일충감소제리고도대막후측량정도영향적측량방법적유효성，병설계개발료쾌속다빈측시계통；설계료전와류재선화리선검측계통，병성공응용우국가중대전항항목“초저하압력화학궤계포광장비양궤”중，실현료용전와류방법진행전자동、쾌속、다모식、대제리조건하적정원금속막후도납미급분변솔재선측량화정원포광후동막후도리선전국측량。
Measurement theory and methods of metal layer thickness on wafer with nanometer precision are stud-ied.To realize the high-accuracy and high-speed metal-lic thickness measurement , the theoretical calculation and numerical simulation are used to study the influence factors of sensitivity of eddy current sensor , and a new effective methods to increase the sensitivity and de-crease the influence of liftoff vibration has been pro-posed and experimentally demonstrated .The measure-ment system ( in-situ and off-line ) is developed and successfully applied to the chemical mechanical polis-hing instrument .The developed measurement system al-so has more potential application in the other filed , such as the nanometer near-field optics device , surface plas-mon polaritons ( SPPs ) , optical superlens and very large scale integration ( VLSI) etc.