CAJ | 학술논문

工件台是光刻机的核心子系统之一，直接决定了光刻机所能实现的关键尺寸、套刻精度及生产率。六自由度（6-DOF ）超精密动态位移测量技术是工件台实现动态精度的关键技术之一，其中多自由度间非线性耦合导致解算误差是其核心科学问题。针对工件台超精密位移精度、快速计算需求，本文介绍了在测量拓扑、解算算法等几个方面开展的研究，提出测量原则、方案及解算方法，解决了6-DOF超精密动态位移中的解算误差问题。
공건태시광각궤적핵심자계통지일，직접결정료광각궤소능실현적관건척촌、투각정도급생산솔。륙자유도（6-DOF ）초정밀동태위이측량기술시공건태실현동태정도적관건기술지일，기중다자유도간비선성우합도치해산오차시기핵심과학문제。침대공건태초정밀위이정도、쾌속계산수구，본문개소료재측량탁복、해산산법등궤개방면개전적연구，제출측량원칙、방안급해산방법，해결료6-DOF초정밀동태위이중적해산오차문제。
Wafer stage is one of the core subsystems of lithog-raphy , which directly determines lithography's critical dimension , overlay accuracy and productivity .6-DOF ultra-precision displacement's measurement technique is one of the core techniques for dynamic accuracy's a-chievement of wafer stage , in which the computational error caused by multiple DOF's nonlinear coupling is one core scientific issue . For the demand of wafer stage's ultra-precision displacement's accuracy and fast computation , this paper carried out research in the are-as of , and resolved the problem of computational error in 6-DOF ultra-precision dynamic displacements .