CAJ | 학술논문

光学材料的亚表面损伤层( SSD )是激光光学领域内的研究热点之一。亚表面损伤层的存在将导致其表面薄膜特性发生变化，尤其是在高精度低损耗激光薄膜的设计与制造中亚表面损伤层必须给予考虑。文中研究了亚表面损伤层的物理特性，并借助于椭圆偏振仪测量基底表面的椭偏光谱，反演计算出SSD的物理厚度和折射率梯度。通过计算得到了亚表面的深度和梯度对激光减反膜反射率光谱的影响，证明了亚表面深度对反射率的影响具有周期效应。在考虑亚表面损伤层的深度和梯度存在的基础上，对激光减反膜的设计进行了理论修正，数值实验结果证明通过膜系的修正可以实现633 nm处的零反射。
광학재료적아표면손상층( SSD )시격광광학영역내적연구열점지일。아표면손상층적존재장도치기표면박막특성발생변화，우기시재고정도저손모격광박막적설계여제조중아표면손상층필수급여고필。문중연구료아표면손상층적물리특성，병차조우타원편진의측량기저표면적타편광보，반연계산출SSD적물리후도화절사솔제도。통과계산득도료아표면적심도화제도대격광감반막반사솔광보적영향，증명료아표면심도대반사솔적영향구유주기효응。재고필아표면손상층적심도화제도존재적기출상，대격광감반막적설계진행료이론수정，수치실험결과증명통과막계적수정가이실현633 nm처적령반사。
Subsurface damage (SSD) of optical material is a focal point of research in laser optical field. The existence of SSD of substrates would change the properties of thin film, and the influence of the surface damage in substrates is essential to ansider during the design, manufacture of high precision low loss laser antireflection coating. Physical properties of SSD were studied. And the physical thickness and refractive index gradient of SSD could be retrieved by the spectroscopic ellipsometry of substrate surface. Then the effect of them on reflection spectrum of antireflection coating was obtained by calculation. The depth of SSD affects the reflection spectrum periodically. At last, with depth and gradient of SSD taken into account, the design of laser antireflection coating was revised theoretically, and the numerical experiment shows that the design is possible to realize zero-reflection at 633 nm.