CAJ | 학술논문

利用原子发射光谱对等离子体粒子密度进行诊断的 Saha-Boltzmann方程法，并对其进行了改进。并结合多谱线斜率法，针对用英国 avantes公司生产的 AvaSpec-2048FT-8-RM型光栅光谱仪采集到的金属蒸汽真空弧(MEVVA)源生成的金属钛等离子体的发射光谱，对其电子、离子温度，电子、原子、一价离子和二价离子密度，原子和一价离子电离度进行诊断；对 MEVVA Ti等离子体的热力学状态进行了判断；从而实现MEVVA Ti等离子体的发射光谱诊断。此外，还对 MEVVA Ti等离子体参数随离子源工作弧压的变化情况进行了讨论。
이용원자발사광보대등리자체입자밀도진행진단적 Saha-Boltzmann방정법，병대기진행료개진。병결합다보선사솔법，침대용영국 avantes공사생산적 AvaSpec-2048FT-8-RM형광책광보의채집도적금속증기진공호(MEVVA)원생성적금속태등리자체적발사광보，대기전자、리자온도，전자、원자、일개리자화이개리자밀도，원자화일개리자전리도진행진단；대 MEVVA Ti등리자체적열역학상태진행료판단；종이실현MEVVA Ti등리자체적발사광보진단。차외，환대 MEVVA Ti등리자체삼수수리자원공작호압적변화정황진행료토론。
A method to measure plasma particle density by atomic emission spectroscopy (Saha-Boltzmann method)was modified and improved.Multi-line slope method was used to analyze emission spectra of MEVVA Ti plasma which were obtained from AvaSpec-2048FT-8-RM platform Fiber Optic Spectrometer.Temperature of electron and ion,particle density of electron,atom,monovalent ion and divalent ion,and ionization of atom and monovalent ion were diagnosed.The thermodynamic state was also discussed.Emission spectroscopy diagnostic of MEVVA Ti plasma was achieved.Relationship between plasma parameters and arc voltage of ion source was also discussed.