长春工业大学学报(自然科学版)
長春工業大學學報(自然科學版)
장춘공업대학학보(자연과학판)
JOURNAL OF CHANGCHUN UNIVERSITY OF TECHNOLOGY(NATURAL SCIENCE EDITION)
2013年
6期
635-639
,共5页
光栅刻划机%刀架系统%刻线弯曲
光柵刻劃機%刀架繫統%刻線彎麯
광책각화궤%도가계통%각선만곡
grating ruling machine%ruling tool system%bend of line
研究了光栅刻划刀架系统结构、重量及其稳定性对光栅性能指标的影响。有限元分析表明,对刻划刀架系统中的刻划刀架进行减重或使刻划刀架系统两侧的重量对称,均可降低光栅刻线弯曲。光栅刻划对比实验结果表明,配重侧有配重块的刻划刀架系统与配重侧无配重块的刻划刀架结构相比,刻线弯曲幅值由91.2 nm降低至58.9 nm ,这与有限元分析结果在趋势上较为一致。
研究瞭光柵刻劃刀架繫統結構、重量及其穩定性對光柵性能指標的影響。有限元分析錶明,對刻劃刀架繫統中的刻劃刀架進行減重或使刻劃刀架繫統兩側的重量對稱,均可降低光柵刻線彎麯。光柵刻劃對比實驗結果錶明,配重側有配重塊的刻劃刀架繫統與配重側無配重塊的刻劃刀架結構相比,刻線彎麯幅值由91.2 nm降低至58.9 nm ,這與有限元分析結果在趨勢上較為一緻。
연구료광책각화도가계통결구、중량급기은정성대광책성능지표적영향。유한원분석표명,대각화도가계통중적각화도가진행감중혹사각화도가계통량측적중량대칭,균가강저광책각선만곡。광책각화대비실험결과표명,배중측유배중괴적각화도가계통여배중측무배중괴적각화도가결구상비,각선만곡폭치유91.2 nm강저지58.9 nm ,저여유한원분석결과재추세상교위일치。
Influence of some parameters such as structural symmetry ,weight and stability of grating ruling tool systems on grating quality is studied .We find that reducing the weight of ruling tool and making it symmetry on both side can decrease the bend of grating line with finite element analysis method .T he experimental results show that show s that the bend attitude go from 91 .2 nm dow n to 58 .9 nm when the counterweight is added ,which is accordance with the theoretical results .