传感技术学报
傳感技術學報
전감기술학보
Journal of Transduction Technology
2014年
1期
26-31
,共6页
张蔚云%闫树斌%甄国涌%薛晨阳%郑永秋
張蔚雲%閆樹斌%甄國湧%薛晨暘%鄭永鞦
장위운%염수빈%견국용%설신양%정영추
光电子学%微球腔%锁频%扫频%调制
光電子學%微毬腔%鎖頻%掃頻%調製
광전자학%미구강%쇄빈%소빈%조제
optoelectronics%microsphere cavity%frequency locking%frequency sweeping%modulation
微腔角速度传感系统是新一代光学传感器的代表。提出一种面向角速度传感系统的微球腔,其中微球腔作为核心部件直径约为1 mm,根据测量及相关公式计算,半高全宽为10.5 MHz,自由谱宽65.89 GHz,Q值1.84×107,精细度为6.26×103。微球腔特有的高Q值、高分辨率、制备简单等性能,使其具有长远的发展前景。详细介绍了整个系统的工作原理,并通过使用不同波形、不同频率的扫频及调制信号进行实验,对比透射曲线和鉴频曲线的形态,获得在球腔系统中的最适参数。经验证,使用频率为10 Hz的正弦波进行扫频,1 MHz的三角波作为进行调制,能够使系统处于更优的状态。
微腔角速度傳感繫統是新一代光學傳感器的代錶。提齣一種麵嚮角速度傳感繫統的微毬腔,其中微毬腔作為覈心部件直徑約為1 mm,根據測量及相關公式計算,半高全寬為10.5 MHz,自由譜寬65.89 GHz,Q值1.84×107,精細度為6.26×103。微毬腔特有的高Q值、高分辨率、製備簡單等性能,使其具有長遠的髮展前景。詳細介紹瞭整箇繫統的工作原理,併通過使用不同波形、不同頻率的掃頻及調製信號進行實驗,對比透射麯線和鑒頻麯線的形態,穫得在毬腔繫統中的最適參數。經驗證,使用頻率為10 Hz的正絃波進行掃頻,1 MHz的三角波作為進行調製,能夠使繫統處于更優的狀態。
미강각속도전감계통시신일대광학전감기적대표。제출일충면향각속도전감계통적미구강,기중미구강작위핵심부건직경약위1 mm,근거측량급상관공식계산,반고전관위10.5 MHz,자유보관65.89 GHz,Q치1.84×107,정세도위6.26×103。미구강특유적고Q치、고분변솔、제비간단등성능,사기구유장원적발전전경。상세개소료정개계통적공작원리,병통과사용불동파형、불동빈솔적소빈급조제신호진행실험,대비투사곡선화감빈곡선적형태,획득재구강계통중적최괄삼수。경험증,사용빈솔위10 Hz적정현파진행소빈,1 MHz적삼각파작위진행조제,능구사계통처우경우적상태。
The velocity sensor system which based on microcavity is a novel candidate for the next generation interial rotation sensor. For the angular velocity sensing system, the microsphere cavity is proposed. The key part of the system is the microsphere cavity of which diameter is 1 mm. According to the measurement and related formula,the free spectral range of the resonator ( FSR ) , the full width at half maximum of the resonance curve ( FWHM ) , the value of Q and the fineness of the resonator(F)are 10. 5 MHz,65. 89 GHz,1. 84×107,6. 26×103. The unique properties such as high-Q,high resolution,simple preparation and others make the microsphere cavity has a long-term development prospects. Describes the working principle of the whole system,we have used sweep signal and the modulated signal with different waveforms,different frequency to experiment,contrasted the shape of transmittance curves and frequency discriminator curve,and then acquired the most appropriate parameters in the system. After authentication,the system can be in a better state by using a 10 Hz sine wave to be frequency sweeping signal and a 1 MHz triangle wave to be modulation signal.