CAJ | 학술논문

在光敏面上镀制荧光薄膜将紫外光转变为可见光，是提高CCD和CMOS图像传感器紫外响应灵敏度的一种有效方法。针对荧光薄膜入射界面的散射和反射损耗降低荧光发光强度的分析，研究在荧光薄膜上镀制增透膜和阻隔膜的灵敏度增强特性。采用真空热阻蒸发的镀膜方法分别制备了单层Lumogen荧光薄膜和MgF2/Lumogen复合膜。利用原子力显微镜，紫外可见近红外分光光度计，荧光光谱仪对两种样品的表面粗糙度，漫反射和透射光谱以及荧光发光光谱分别进行对比测试分析。结果表明：M g F2保护层降低了表面粗糙度，减小了入射界面的漫反射损耗，对500～700 nm的可见波段具有明显增透作用，也增强了Lumogen薄膜对紫外波段受激发射的荧光强度；同时，MgF2薄膜的抗损伤及水汽隔离性能对荧光薄膜紫外响应能力具有保护作用，为延长紫外CCD薄膜及器件的工作寿命提供了有效手段。
재광민면상도제형광박막장자외광전변위가견광，시제고CCD화CMOS도상전감기자외향응령민도적일충유효방법。침대형광박막입사계면적산사화반사손모강저형광발광강도적분석，연구재형광박막상도제증투막화조격막적령민도증강특성。채용진공열조증발적도막방법분별제비료단층Lumogen형광박막화MgF2/Lumogen복합막。이용원자력현미경，자외가견근홍외분광광도계，형광광보의대량충양품적표면조조도，만반사화투사광보이급형광발광광보분별진행대비측시분석。결과표명：M g F2보호층강저료표면조조도，감소료입사계면적만반사손모，대500～700 nm적가견파단구유명현증투작용，야증강료Lumogen박막대자외파단수격발사적형광강도；동시，MgF2박막적항손상급수기격리성능대형광박막자외향응능력구유보호작용，위연장자외CCD박막급기건적공작수명제공료유효수단。
A low cost and less complicated expansion approach of wavelength responses with a Lumogen phosphor coating was adopted ,as they increased the quantum efficiency of CCD and CMOS detectors in ultra-violet by absorbing UV light and then re-emitting visible light .In this paper ,the sensitivity enhancement of fluorescence coatings was studied by adding an anti-reflection film or barrier film to reduce the loss of the scattering and reflection on the incident interface .The Lumogen and MgF2/Lumogen film were deposited on quartz glasses by physical vacuum deposition .The surface morphology ,transmittance spectrum ,reflec-tance spectrum and fluorescence emission spectrum were obtained by atomic force microscope (AFM ) ,spectrophotometer and fluorescence spectrometer ,respectively .The results indicated that MgF2 film had obvious positive effect on reducing scattering and reflection loss in 500~700 nm ,and enhancing the absorption of Lumogen coating in ultraviolet spectrum .Meanwhile ,the fluorescent emission intensity had a substantial increase by smoothing the film surface and thus reducing the light scattering .At the same time ,the MgF2 layer could protect Lumogen coating from damaging and contamination ,which give a prolong lifetime of the UV-responsive CCD sensors with fluorescent coatings .