CAJ | 학술논문

以WO3粉末为原料，通过两步气相沉积法在硅基底上制备W/WO2.72一维纳米异质结构。采用扫描电子显微镜(SEM)、透射电子显微镜(TEM)及X射线衍射分析(XRD)等检测手段对制备出的W/WO2.72异质结构进行形貌、结构和物相的分析表征。结果表明：异质结构的主干W晶须沿[110]方向生长，长10~25μm、直径200~500 nm，分支WO2.72纳米线沿径向竖直分布在W晶须轴上并沿[010]方向生长，直径20~50 nm。该异质结构因其独特的组成和结构可用于超高灵敏性传感器和场发射设备。
이WO3분말위원료，통과량보기상침적법재규기저상제비W/WO2.72일유납미이질결구。채용소묘전자현미경(SEM)、투사전자현미경(TEM)급X사선연사분석(XRD)등검측수단대제비출적W/WO2.72이질결구진행형모、결구화물상적분석표정。결과표명：이질결구적주간W정수연[110]방향생장，장10~25μm、직경200~500 nm，분지WO2.72납미선연경향수직분포재W정수축상병연[010]방향생장，직경20~50 nm。해이질결구인기독특적조성화결구가용우초고령민성전감기화장발사설비。
One dimensional nano W/WO2.72 heterostructures have been successfully synthesized on silicon substrate by a two-step chemical vapor deposition process with WO3 as raw material. The morphology, microstructure and phase composition of the heterostructures were characterized by scanning electron microscopy, transmission electron microscopy and X-ray diffraction analysis. The results show that the axial stem W whisker grows along [110] direction, with diameter of 200~500 nm and length of 10~25 μm, and the branched WO2.72 nanowires growing along [010] direction radially aligned over the surface of W whisker with diameter of 20~50 nm. The heterostructures are expected to be used for ultrahigh sensitivity sensors and field-emission devices due to its unique composition and structure.