CAJ | 학술논문

为了实现长焦距的精确测量，基于泰伯莫尔法测量长焦距的原理，构建出了由准直波前发生器、泰伯干涉仪和成像采集系统组成的长焦距测量装置。分析了准直波前畸变对焦距测量精度的影响，用数值分析的方法分析了待测样品到光栅G1的距离s，光栅G1、G2的间距d以及栅线夹角对焦距测量精度的影响。提出了具体的装调方法：用五棱镜法检测波前，保证准直波前质量PV值优于一个波长；用光栅尺位移传感器测量s，标定d，使其精度达到0.1 mm；采用标准反射凹球面法标定光栅夹角，使光栅夹角的装调精度达到0.001o。对焦距为5436 mm的透镜进行实验测量，误差小于0.35%。
위료실현장초거적정학측량，기우태백막이법측량장초거적원리，구건출료유준직파전발생기、태백간섭의화성상채집계통조성적장초거측량장치。분석료준직파전기변대초거측량정도적영향，용수치분석적방법분석료대측양품도광책G1적거리s，광책G1、G2적간거d이급책선협각대초거측량정도적영향。제출료구체적장조방법：용오릉경법검측파전，보증준직파전질량PV치우우일개파장；용광책척위이전감기측량s，표정d，사기정도체도0.1 mm；채용표준반사요구면법표정광책협각，사광책협각적장조정도체도0.001o。대초거위5436 mm적투경진행실험측량，오차소우0.35%。
In order to achieve high-accuracy measurement of the long focal length, a method of measuring long focal length based on Talbot-Moiré effect was studied in this paper, a long focal length test device was established, it included a collimated wavefront generator, a Talbot interferometer and a imaging system. The effect of wavefront aberration on accuracy of focal length was analyzed. Then the distance s from the sample to the grating G1, the space d between grating G1 and grating G2,and angle of two grating lines as influencing factors on accuracy of focal length were analysed. The alignment method to improve the accuracy was proposed. Pentaprism method for the detection of wavefront was introduced, to ensure that the collimated wavefront quality better than a wavelength. The linear grating encoder was used to measure s and calibrate d, to make the accuracy of the distance better than 0.1 mm. A reference reflective concave sphere was used for angle calibration, to make the accuracy of angle better than 0.001o. The experimental results show that the relative error is less than 0.35% when measured focal length is 5 436 mm.