CAJ | 학술논문

在已知的压电材料中,AlN薄膜的声表面波传播速度是最快的。采用硅基AlN薄膜作为压电材料,利用变迹加权的方法来优化设计IDT,改进型啄函数模型为椭圆形结构IDT的建模工具。通过建模仿真并根据仿真结果设计SAW带通滤波器版图,在实验室制作了中心频率为300MHz,带内插损11dB的SAW带通滤波器样品,测试结果表明其仿真结果与试验结果一致性较好,具有实际应用意义。
재이지적압전재료중,AlN박막적성표면파전파속도시최쾌적。채용규기AlN박막작위압전재료,이용변적가권적방법래우화설계IDT,개진형탁함수모형위타원형결구IDT적건모공구。통과건모방진병근거방진결과설계SAW대통려파기판도,재실험실제작료중심빈솔위300MHz,대내삽손11dB적SAW대통려파기양품,측시결과표명기방진결과여시험결과일치성교호,구유실제응용의의。
The propagation velocity of surface acoustic wave ( SAW ) of AlN film is the fastest in the known piezoelectric materials. The AlN/Si film is used in this design,weighting apodization methods was used to optimize the design of IDT,and the improvedδfunction model was used as modeling tool of weighted apodization ellipse IDT structure. According to the results of simulation,a layout of SAW band-pass filter was designed and a sample was fabricated with center frequency of 300 MHz and insertion loss of 11 dB. The test results show the consistency of simulation results and experimental results. The design shows its potential in practical application.