传感技术学报
傳感技術學報
전감기술학보
Journal of Transduction Technology
2013年
12期
1686-1690
,共5页
刘恒%范江棋%孟瑞丽%李宏升%张宏群%周吴
劉恆%範江棋%孟瑞麗%李宏升%張宏群%週吳
류항%범강기%맹서려%리굉승%장굉군%주오
硅微机械结构%振动幅度%单边带比%频谱
硅微機械結構%振動幅度%單邊帶比%頻譜
규미궤계결구%진동폭도%단변대비%빈보
silicon micromachined structure%vibration amplitude%single sideband ration%frequency spectrum
针对硅微机械结构振动幅度由于封装难以计算机视觉测量及电学测量中的精度受接口电路参数影响的问题,在对静电梳齿驱动、平板电容检测的硅微谐振结构进行建模分析后,提出基于单边带电压比的电学测量振动幅度的方法并分析了测量方法的原理。实验表明研制的某硅微机械谐振加速度计在受迫振动下的振动幅度为0.25μm,频谱分析还表明存在上电噪声引起的振动幅度,该测试方法还能应用于硅微谐振结构的谐振频率测量,同时为高品质因数的硅微机械谐振结构的可静电自激驱动提供了依据。
針對硅微機械結構振動幅度由于封裝難以計算機視覺測量及電學測量中的精度受接口電路參數影響的問題,在對靜電梳齒驅動、平闆電容檢測的硅微諧振結構進行建模分析後,提齣基于單邊帶電壓比的電學測量振動幅度的方法併分析瞭測量方法的原理。實驗錶明研製的某硅微機械諧振加速度計在受迫振動下的振動幅度為0.25μm,頻譜分析還錶明存在上電譟聲引起的振動幅度,該測試方法還能應用于硅微諧振結構的諧振頻率測量,同時為高品質因數的硅微機械諧振結構的可靜電自激驅動提供瞭依據。
침대규미궤계결구진동폭도유우봉장난이계산궤시각측량급전학측량중적정도수접구전로삼수영향적문제,재대정전소치구동、평판전용검측적규미해진결구진행건모분석후,제출기우단변대전압비적전학측량진동폭도적방법병분석료측량방법적원리。실험표명연제적모규미궤계해진가속도계재수박진동하적진동폭도위0.25μm,빈보분석환표명존재상전조성인기적진동폭도,해측시방법환능응용우규미해진결구적해진빈솔측량,동시위고품질인수적규미궤계해진결구적가정전자격구동제공료의거。
Drawback of computer aided vision measurement method presents because of the package of the silicon micromachined structure system, that the vibration amplitude accuracy of mechanical system is affected by the interface circuit parameters for electrical measurement. A model for silicon resonant structure with driving combs and sensing parallel plates is constructed and a new electrical measurement is also proposed based on single sideband ration. Experiment result show that the vibration amplitude is 0. 25 μm for a resonant micro accelerometer with 20 kHz AC driving voltage. Spectral analysis also showed the presence of vibration amplitude caused by electrical noise,this test method can also be applied to measure the resonant frequency for silicon micro structure.