CAJ | 학술논문

为适应工业发展和计量界对精密定位提出的越来越高的要求，提出了基于偏振激光干涉技术的纳米定位方法。在该干涉测长系统中，用偏振计取代传统单频激光干涉仪的光电传感器并配置偏振分光元件、起偏镜等，可将干涉仪出射光的干涉条纹相位细分为36000份，使用波长为633 nm的激光源，可将理论测量分辨率提高到10 pm。将完成的偏振干涉测长系统与商用SIOS干涉仪的实验测量结果做了比对。对完成的实验系统的各误差源做了实验研究，得到量化值。经不确定度评估计算，在标准实验室环境条件下，对于微米级行程的位移，其位置测量不确定度小于1.4 nm。该方法可应用于纳米定位的各个领域。
위괄응공업발전화계량계대정밀정위제출적월래월고적요구，제출료기우편진격광간섭기술적납미정위방법。재해간섭측장계통중，용편진계취대전통단빈격광간섭의적광전전감기병배치편진분광원건、기편경등，가장간섭의출사광적간섭조문상위세분위36000빈，사용파장위633 nm적격광원，가장이론측량분변솔제고도10 pm。장완성적편진간섭측장계통여상용SIOS간섭의적실험측량결과주료비대。대완성적실험계통적각오차원주료실험연구，득도양화치。경불학정도평고계산，재표준실험실배경조건하，대우미미급행정적위이，기위치측량불학정도소우1.4 nm。해방법가응용우납미정위적각개영역。
Aiming at the requirement of higher accuracy of positioning in industry and metrology, a positionning method is proposed based on polarimetric interferometer. In this interferometric system,a polarimeter combined with polarization beamsplitter and polarizer has replaced photo-detector. The fringe interpolation of output laser beam can be reached at 36 000,for a 633 nm laser source,the potential theoretical resolution is 10 pm. The measurements have both carried out by own-developed polarimetric interferometer and commercial SIOS interferometer. The comparison results between this two interferometer show that the polarimetric interferometer is feasible. The experiments have also been done to get the quantified value for each source of errors. Under standard experimental environment,according to uncertainty evaluation,the total uncertainty of measurement is less than 1. 4 nm over mi-crometric displacement range. This method can be dedicated to various fields of nano-positioning.