CAJ | 학술논문

电子倍增CCD(EMCCD)性能参数测试是电子倍增CCD芯片及其成像系统研制的重要辅助手段和设计依据。在对 EMCCD的工作原理进行了阐述之后，介绍了 EMCCD 的各项特性参数，分析了相关参数的测试方法。针对测试过程中出现的单位转换问题，引入了转换增益的概念，提出了基于改进的光子转移技术的EMCCD性能参数的测试方法，建立了EMCCD性能参数测试系统，该系统包括高稳定度可控标准钨灯、光学系统、暗箱、数据采集与处理系统等。对Andor Luca相机的转换增益、满阱容量、倍增增益、读出噪声、时钟诱导噪声和暗电流进行了测试。实验结果表明：测试值与相机的指标值基本一致，测试结果准确，证明了所提出的测试方法有效可靠。
전자배증CCD(EMCCD)성능삼수측시시전자배증CCD심편급기성상계통연제적중요보조수단화설계의거。재대 EMCCD적공작원리진행료천술지후，개소료 EMCCD 적각항특성삼수，분석료상관삼수적측시방법。침대측시과정중출현적단위전환문제，인입료전환증익적개념，제출료기우개진적광자전이기술적EMCCD성능삼수적측시방법，건립료EMCCD성능삼수측시계통，해계통포괄고은정도가공표준오등、광학계통、암상、수거채집여처리계통등。대Andor Luca상궤적전환증익、만정용량、배증증익、독출조성、시종유도조성화암전류진행료측시。실험결과표명：측시치여상궤적지표치기본일치，측시결과준학，증명료소제출적측시방법유효가고。
The performance test of Electron multiplying CCD (EMCCD) is an important adjunct and design basis of electron multiplying CCD chip and the whole imaging system. In this paper, the working principles of EMCCD were introduced, and then the characteristic parameters of EMCCD was presented. Aiming at the problem of unit conversion in the process of testing, the concept of conversion gain was introduced.The parameters test of the electron multiplying CCD was proposed based on improved photon transfer technology, the EMCCD performance parameter testing system also was established. The system included a high stability and controllable standard tungsten lamp, optical system, the black box, data acquisition and processing system.These parameters were tested, such as convert gain, full well, multiplication gain,noise factor, readout noise, dark current noise and clock induced charge noise of Andor Luca camera.The experimental results are really good and agree with the device specifications . These also verify the feasibility and reliability of the test method.