CAJ | 학술논문

介绍了CVD ZnS生产工艺、真空气相沉积炉技术性能、设备结构组成及特点。该真空气相沉积炉是制备大尺寸ZnS的关键设备，它生产的CVD ZnS板料尺寸达到了1800 mm（长）×800 mm（宽）×25 mm （厚），单炉产量为1000 kg ，是国内生产ZnS板坯料尺寸最大、单炉产量最多的设备。
개소료CVD ZnS생산공예、진공기상침적로기술성능、설비결구조성급특점。해진공기상침적로시제비대척촌ZnS적관건설비，타생산적CVD ZnS판료척촌체도료1800 mm（장）×800 mm（관）×25 mm （후），단로산량위1000 kg ，시국내생산ZnS판배료척촌최대、단로산량최다적설비。
The CVD ZnS production process and technical performance,mechanical structural characteristics of the vacuum chemical vapor deposition furnace were introduced.The workpiece dimension is 1800 m m(length)×800 m m(width)×25 m m(thickness),the output is 1000 kg per furnace.It is a key equipment for large size CVD ZnS production and also the largest furnace in domestic.