CAJ | 학술논문

大功率电力半导体器件是电力电子行业的基础和核心。随着电力半导体器件产量越来越大，功率和电压等级越来越高，对其测试效率和测试质量的要求也越来越高。压力夹具是大功率半导体器件测试必不可少的环节，因此研制高效率、低成本及技术先进的大功率半导体器件测试压力夹具十分必要。采用电气比例阀控制气液增压缸压力技术研制一种新型压力夹具，实验结果表明：该夹具在相当大的范围内具有很好的控制精度和线性度。
대공솔전력반도체기건시전력전자행업적기출화핵심。수착전력반도체기건산량월래월대，공솔화전압등급월래월고，대기측시효솔화측시질량적요구야월래월고。압력협구시대공솔반도체기건측시필불가소적배절，인차연제고효솔、저성본급기술선진적대공솔반도체기건측시압력협구십분필요。채용전기비례벌공제기액증압항압력기술연제일충신형압력협구，실험결과표명：해협구재상당대적범위내구유흔호적공제정도화선성도。
High power electric semiconductor device is the foundation and core of the power electronics industry. As the pro-duction volume of power semiconductor devices are more and more big,power and voltage level is more and more high,the require-ments to test efficiency and test quality are increasingly high. Pressure fixture is necessary for the test of high power semiconductor device. So,it's necessary to develop high power semiconductor device test pressure fixture which has high efficiency,low cost and advanced technology. The technology that electric proportional valve was used to control the pressure of the gas-liquid pressurized cylinder was adopted to design a novel pressure fixture. Experimental results indicate that the proposed pressure fixture has good ac-curacy and linearity.