CAJ | 학술논문

在大口径光学镜面的检测中，随着参考镜尺寸的增加，加工精度的制约，重力变形，温度，环境等因素的影响使得参考镜在检测中已经不能作为理想平面镜。文中基于最大似然估计(ML)算法， Zernike多项式拟合对利用非理想平面镜作为参考镜的子孔径拼接检测建立了一套合理的拼接算法和数学模型。并结合工程实例，完成了对2.5 m×3.5 m椭圆形平面镜的模拟拼接实验，拼接前后全孔径面形误差分布是一致的，其PV值和RMS值的偏差分别为0.022λ与0.0013λ。全口径相位分布的PV值与RMS值的相对误差分别为2.81%与0.81%。实验结果表明：利用ML拼接算法可以高精度地完成对参考镜为非理想平面的大口径平面镜的拼接检测。
재대구경광학경면적검측중，수착삼고경척촌적증가，가공정도적제약，중력변형，온도，배경등인소적영향사득삼고경재검측중이경불능작위이상평면경。문중기우최대사연고계(ML)산법， Zernike다항식의합대이용비이상평면경작위삼고경적자공경병접검측건립료일투합리적병접산법화수학모형。병결합공정실례，완성료대2.5 m×3.5 m타원형평면경적모의병접실험，병접전후전공경면형오차분포시일치적，기PV치화RMS치적편차분별위0.022λ여0.0013λ。전구경상위분포적PV치여RMS치적상대오차분별위2.81%여0.81%。실험결과표명：이용ML병접산법가이고정도지완성대삼고경위비이상평면적대구경평면경적병접검측。
To the testing of large-diame ter optical mirror, with the increase in the size of the reference mirror, it can′t be treated as an ideal plane mirror because of the constraints of the machining accuracy, gravity deformation, temperature, environment impact. Based on the maximum likelihood estimation, Zernike polynomials fitting, a reasonable stitching algorithms and mathematical models was established for non-ideal standard lens sub-aperture stitching. Stitching experiment was accomplished on the computer with a 2.5 m×3.5 m oval plane mirror as an engineering example. The full-aperture surface error distribution after stitching was consistent with the original. PV and RMS deviation were 0.022λ and 0.001 3λ. The full aperture phase distribution of the PV value and the RMS value of relative error was 2.81% and 0.81% respectively. The experimental results show that: large-diameter plane mirror can be tested with non-ideal reference mirror in high precision using the ML algorithm.