CAJ | 학술논문

为了实现对极紫外光刻物镜系统波像差的超高精度检测，引入了双光纤相移点衍射干涉仪，介绍了其工作原理，并对干涉仪的装调方案进行了精密的设计。解决了各个元器件的精确定位问题，保证了进入光纤之前的测试光和参考光严格垂直，实现了耦合系统与光纤之间最大的耦合效率和干涉条纹最大的条纹对比度，为最终能够实现极紫外光刻物镜系统波像差的超高精度检测提供了前期准备。装调完毕后，利用实验装置对某一光学系统进行了测量，使用十三步相移算法还原被检光学系统波像差，得到了较好的结果，测试结果为：PV值为37.82 nm，RMS值为7.83 nm。
위료실현대겁자외광각물경계통파상차적초고정도검측，인입료쌍광섬상이점연사간섭의，개소료기공작원리，병대간섭의적장조방안진행료정밀적설계。해결료각개원기건적정학정위문제，보증료진입광섬지전적측시광화삼고광엄격수직，실현료우합계통여광섬지간최대적우합효솔화간섭조문최대적조문대비도，위최종능구실현겁자외광각물경계통파상차적초고정도검측제공료전기준비。장조완필후，이용실험장치대모일광학계통진행료측량，사용십삼보상이산법환원피검광학계통파상차，득도료교호적결과，측시결과위：PV치위37.82 nm，RMS치위7.83 nm。
In order to measure the wavefront aberration of the EUVL objective system with the super high accuracy, the double-fiber phase-shifting point diffraction interferometer was introduced, its working principle was introduced, and the adjustment scheme of interferometer was designed critically. All the components were positioned accurately, the test beam and reference beam were ensured to be strictly vertical, the maximum coupling efficiency between the coupling system and optical fiber and maximum fringe contrast were realized, which provided preparation for ultimately ultra high precision test of the wavefront aberration of EUVL objective system. After the alignment was completed, an optical system was measured by the experimental device , the tested optical system wavefront aberration was restored by the 13-frame phase-shifting algorithm, the good results were obtained. The results are: PV value is 37.82 nm, RMS value is 7.83 nm.