CAJ | 학술논문

为了提高光学元件的面形精度，提高加工效率，针对平面光学零件，以抛光去除效率和表面粗糙度为考核指标，对影响进动气囊抛光的几个工艺参数进行了正交试验及分析，得出各工艺参数对抛光去除效率和表面粗糙度的影响规律。确定最佳工艺参数，并在此条件下进行了气囊抛光工艺试验，通过Matlab软件拟合出了气囊抛光去除函数，为开展驻留时间的计算和面形控制提供了依据。
위료제고광학원건적면형정도，제고가공효솔，침대평면광학령건，이포광거제효솔화표면조조도위고핵지표，대영향진동기낭포광적궤개공예삼수진행료정교시험급분석，득출각공예삼수대포광거제효솔화표면조조도적영향규률。학정최가공예삼수，병재차조건하진행료기낭포광공예시험，통과Matlab연건의합출료기낭포광거제함수，위개전주류시간적계산화면형공제제공료의거。
In order to improve the surface accuracy and processing efficiency of optical element, the orthogonal experiment by the processing parameters that influence bonnet polishing is made with the influence to the removal efficiency and surface roughness on the plane optical work-pieces. The result is discussed and analyzed according to bonnet polishing mechanism and material removal mechanism. The optimization parameters of bonnet polishing optical glass is got. Through the experiments integrated process parameters, the removal function of precession bonnet polishing is fitted by Matlab. This also makes it convenience for the later work like the solution of resident time and the surface control.