CAJ | 학술논문

为获得同时具有低表面粗糙度和高面形精度的微晶玻璃基片，利用PS（聚苯乙烯）微球和CeO2磨粒制备出核壳型复合磨粒，替代了单一CeO2磨粒进行抛光试验。通过全因子试验研究PS微球粒径和质量浓度对微晶玻璃基片的材料去除率（MRR）、表面粗糙度和面形精度的影响。试验表明：MRR随着PS微球质量浓度的增大而减小，随着PS微球粒径的增大而增大；PS微球粒径为20μm时，工件塌边显著减小；表面粗糙度随着PS微球浓度的增大而增大。
위획득동시구유저표면조조도화고면형정도적미정파리기편，이용PS（취분을희）미구화CeO2마립제비출핵각형복합마립，체대료단일CeO2마립진행포광시험。통과전인자시험연구PS미구립경화질량농도대미정파리기편적재료거제솔（MRR）、표면조조도화면형정도적영향。시험표명：MRR수착PS미구질량농도적증대이감소，수착PS미구립경적증대이증대；PS미구립경위20μm시，공건탑변현저감소；표면조조도수착PS미구농도적증대이증대。
In order to achieve low surface roughness and high surface figure accuracy of Zerodur glass substrate simultaneously, the polishing experiment was taken by using core-shell structured composite abrasives which were synthesized using PS microspheres and CeO2 abrasives to substitutemono CeO2 abrasives. The effect of particle size and weight concentration of PS microsphere on material removal rate (MRR), surface roughness and surface figure accuracy of Zerodur glass substrate was investigated by full factorial experiments. The result shows that the MRR decreases as weight concentration of PS microspheres grows and increases as the particle size of PS microspheres grows; high surface figure accuracy and small edge roll off of Zerodur glass substrate was obtained when the particle size of PS microspheres is 20μm; surface roughness of Zerodur glass substrate becomes higher as the weight concentration of PS microspheres grows.