CAJ | 학술논문

提出了一种接触式轮廓仪测量非球面参数的新方法，该方法通过在传统的二维接触式轮廓仪基础上增加旋转，从而实现了三维测量。为了验证新方法的测量准确性与可行性，文中使用ZYGO干涉仪对旋转对称球面进行检测，与新方法的检测结果加以对比。最后，使用新方法对非球面光学元件的面形参数进行测试，分析结果表明新的测量方法具备较高的测试精度，满足测量要求。
제출료일충접촉식륜곽의측량비구면삼수적신방법，해방법통과재전통적이유접촉식륜곽의기출상증가선전，종이실현료삼유측량。위료험증신방법적측량준학성여가행성，문중사용ZYGO간섭의대선전대칭구면진행검측，여신방법적검측결과가이대비。최후，사용신방법대비구면광학원건적면형삼수진행측시，분석결과표명신적측량방법구비교고적측시정도，만족측량요구。
This paper proposes a new method to measure contact profilometer aspherical parameters. The method adds a dimension to the conventional two-dimensional rotating contact profilometer in order to achieve a three-dimensional measurement. To verify the veracity and feasibility of the new method, the paper used ZYGO interferometer to measure the sphere of rotational symmetry and compare the measuring result with that of the new method. Finally, the new method is used to measure the parameters of aspheric. The results show that the new measurements have high precision, which meets the measurement requirements.