材料研究与应用
材料研究與應用
재료연구여응용
MATERIALS RESEARCH AND APPLICATION
2014年
3期
165-168
,共4页
张康%张娜%张志清%刘宁炀%王君君%赵维%范广涵%陈志涛%江川孝志
張康%張娜%張誌清%劉寧煬%王君君%趙維%範廣涵%陳誌濤%江川孝誌
장강%장나%장지청%류저양%왕군군%조유%범엄함%진지도%강천효지
InAlN薄膜%GaN%近晶格匹配
InAlN薄膜%GaN%近晶格匹配
InAlN박막%GaN%근정격필배
InAlN film%GaN%near lattice-matched
采用MOCVD方法在AlN/蓝宝石模板生长了与GaN近晶格匹配的高质量 InAlN薄膜,并对其结构及表面特性进行了研究。结果表明:X射线衍射(20-24)面的倒易空间图表明,InAlN薄膜的晶格常数与GaN面的相匹配;(002)和(102)面的ω摇摆曲线测试表明,InAlN薄膜的晶体质量高,半峰宽值分别低达100″和248″;通过扫描电子显微镜(SEM )分析发现,InAlN薄膜表面平整,仅存在少量位错坑;X射线能谱面扫描图(EDX映射)结果显示,除位错坑附近外,在薄膜其它区域内 Al和In元素分布均匀。
採用MOCVD方法在AlN/藍寶石模闆生長瞭與GaN近晶格匹配的高質量 InAlN薄膜,併對其結構及錶麵特性進行瞭研究。結果錶明:X射線衍射(20-24)麵的倒易空間圖錶明,InAlN薄膜的晶格常數與GaN麵的相匹配;(002)和(102)麵的ω搖襬麯線測試錶明,InAlN薄膜的晶體質量高,半峰寬值分彆低達100″和248″;通過掃描電子顯微鏡(SEM )分析髮現,InAlN薄膜錶麵平整,僅存在少量位錯坑;X射線能譜麵掃描圖(EDX映射)結果顯示,除位錯坑附近外,在薄膜其它區域內 Al和In元素分佈均勻。
채용MOCVD방법재AlN/람보석모판생장료여GaN근정격필배적고질량 InAlN박막,병대기결구급표면특성진행료연구。결과표명:X사선연사(20-24)면적도역공간도표명,InAlN박막적정격상수여GaN면적상필배;(002)화(102)면적ω요파곡선측시표명,InAlN박막적정체질량고,반봉관치분별저체100″화248″;통과소묘전자현미경(SEM )분석발현,InAlN박막표면평정,부존재소량위착갱;X사선능보면소묘도(EDX영사)결과현시,제위착갱부근외,재박막기타구역내 Al화In원소분포균균。
High-quality InAlN near lattice-matched (LM ) to GaN has been grow n on AlN/sapphire tem-plates by metalorganic chemical vapor deposition (M OCVD ) , and characterized by X-ray diffraction (XRD) ,energy dispersive X-ray spectroscopy (EDX ) and scanning electron microscope (SEM ) .Results show that InAlN is lattice matched to GaN indicated by XRD mapping measurements (20-24) ,,and ω-scan-ning rocking curve measurements indicate the high quality of InAlN with the full width at half maximums (FWHMs) of (002) and (102) being as low as 100 and 248 arcsec ,respectively .SEM mappings of InAlN surface show some V-pits distribution .EDX measurements indicate homogeneously special distribution of Al and In .