CAJ | 학술논문

碱金属蒸汽腔是芯片原子钟(CSACs)中重要的核心部件之一，其微型化制造具有重要的实用价值，同时也非常具有挑战性。采用MEMS技术批量化制作了具有双腔结构的芯片原子钟87Rb蒸汽腔阵列。在阳极键合过程中，通过原位化学反应产生纯净的87Rb元素蒸汽，缓冲气体（N2）采用反充的方法充入到87Rb蒸汽腔内以保证缓冲气体的压强可以精确的控制。所设计的双腔结构可以防止原位化学反应中产生的杂质阻挡光路，从而能够提高探测到的光信号的强度。通过原子钟桌面系统测试，得到了87Rb元素D1线的光学吸收谱和用于芯片原子钟锁频的误差信号，在90℃时，87Rb 元素D1线纠偏信号的线宽（波峰与波谷间距）可达到0.53 kHz。测试结果表明，双腔结构的87Rb蒸汽腔满足芯片原子钟或其他芯片级原子器件的设计要求。
감금속증기강시심편원자종(CSACs)중중요적핵심부건지일，기미형화제조구유중요적실용개치，동시야비상구유도전성。채용MEMS기술비양화제작료구유쌍강결구적심편원자종87Rb증기강진렬。재양겁건합과정중，통과원위화학반응산생순정적87Rb원소증기，완충기체（N2）채용반충적방법충입도87Rb증기강내이보증완충기체적압강가이정학적공제。소설계적쌍강결구가이방지원위화학반응중산생적잡질조당광로，종이능구제고탐측도적광신호적강도。통과원자종탁면계통측시，득도료87Rb원소D1선적광학흡수보화용우심편원자종쇄빈적오차신호，재90℃시，87Rb 원소D1선규편신호적선관（파봉여파곡간거）가체도0.53 kHz。측시결과표명，쌍강결구적87Rb증기강만족심편원자종혹기타심편급원자기건적설계요구。
Alkali vapor cell is one of the key components of chip- scale atomic clocks (CSACs), and its microfabrication is very significant yet challenging. Arrays of 87Rb vapor cell with dual- chamber for CSACs were batch fabricated by MEMS technology. Pure 87Rb vapor was produced by in- situ chemical reaction during anodic bonding process and buffer gas (N2) was backfilled to ensure the pressure is precisely controlled. The dual- chamber structure helps to prevent the impurity after reaction from blocking light path, in order to improve the intensity of optical signal. Optical absorption spectrum of 87Rb D1 line and the error signal used to lock the frequency of chip- scale atomic clock were finally obtained through experimental test. The peak-to-valley separation of the 87Rb D1 line error signal can reach 0.53 kHz at 90℃, which indicates that the 87Rb vapor cell can meet the requirement of CSACs or other chip- scale atomic devices (CSADs).