CAJ | 학술논문

提出了一种增强量子阱红外探测器耦合效率的双面金属光栅结构。采用三维时域有限差分算法(3D- FDTD)对GaAs/AlGaAs量子阱红外探测器双面结构金属光栅进行了仿真分析。通过对比不同周期、占空比、金属层厚度结构参数下探测器的电场分布及相对耦合效率，确定了4.8μm探测器优化的双面金属光栅结构。与顶部和底部单层金属光栅结构比较，双面金属光栅结构探测器相对耦合效率提高到3倍以上。探测器相对耦合效率随光栅周期变化的双峰曲线特性体现了双面金属光栅结构在双色量子阱红外探测器光耦合方面的潜力。同时该结构还可以应用于单色、双色及多色量子阱焦平面红外探测器。
제출료일충증강양자정홍외탐측기우합효솔적쌍면금속광책결구。채용삼유시역유한차분산법(3D- FDTD)대GaAs/AlGaAs양자정홍외탐측기쌍면결구금속광책진행료방진분석。통과대비불동주기、점공비、금속층후도결구삼수하탐측기적전장분포급상대우합효솔，학정료4.8μm탐측기우화적쌍면금속광책결구。여정부화저부단층금속광책결구비교，쌍면금속광책결구탐측기상대우합효솔제고도3배이상。탐측기상대우합효솔수광책주기변화적쌍봉곡선특성체현료쌍면금속광책결구재쌍색양자정홍외탐측기광우합방면적잠력。동시해결구환가이응용우단색、쌍색급다색양자정초평면홍외탐측기。
A new structure of dual side metal grating used to improve coupling efficiency was demonstrated. By using the three dimensional finite difference time domain algorithm, the proposed dual side metal grating for GaAs/AlGaAs Quantum Well Infrared Photodetector was studied. The optimization parameters at wavelength 4.8μm were confirmed by the electric field distribution and relative coupling efficiency at different periods, duty circles and metal thicknesses. The relative coupling efficiency of the proposed dual side metal grating was over three times of the counterparts of single side metal grating at front or back. The bimodal curve of the relative coupling efficiency for the dual side metal grating inspires possibility for potential application for two color Quantum Well Infrared Photodetector. The dual side metal grating can also be used to couple perpendicular incident light into one color, two color and multi color Quantum Well Infrared Photodetectors and offers a high coupling efficiency.