晶圆清洗机无刷电机齿槽转矩的仿真分析
정원청세궤무쇄전궤치조전구적방진분석
Simulation Analysis of Cogging Torque of Brushless DC Motor Used in Wafer Cleaning Machine
  • 万方数据
    湖北工业大学学报 호북공업대학학보
    JOURNAL OF HUBEI UNIVERSITY OF TECHNOLOGY
    2014年 1期 7-11 ,共5页

    李新华%杜成飞%黄贤蕾%杨垂恭

    리신화%두성비%황현뢰%양수공

    晶圆清洗机%无刷电机%齿槽转矩%脉动转矩%计算机仿真 晶圓清洗機%無刷電機%齒槽轉矩%脈動轉矩%計算機倣真
    정원청세궤%무쇄전궤%치조전구%맥동전구%계산궤방진
    wafer cleaning machine%brushless DC motor%cogging torque%ripple torque%computer simulation
    齿槽转矩对无刷电机低速性能产生重要影响。采用计算机仿真方法研究晶圆清洗机无刷电机的齿槽转矩问题，包括极槽配合、磁极以及定子斜槽/转子斜极对无刷电机齿槽转矩的影响，在此基础上提出晶圆清洗机无刷电机的优化设计方案。
    치조전구대무쇄전궤저속성능산생중요영향。채용계산궤방진방법연구정원청세궤무쇄전궤적치조전구문제，포괄겁조배합、자겁이급정자사조/전자사겁대무쇄전궤치조전구적영향，재차기출상제출정원청세궤무쇄전궤적우화설계방안。
    The cogging torque results in the low speed performance of brushless DC motors.In this paper, the cogging torque of wafer cleaning machine brushless DC motor was researched by computer simulation, including the influence of the slot/pole combination,skewing slot/skewing magnet pole.On this basis,the optimal design of wafer cleaning brushless DC motor was proposed.
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