CAJ | 학술논문

磁控溅射真空镀膜技术与传统的化学电镀技术相比，具有环保、降耗、减排等优点，磁控电源是这种镀膜装置的关键部件之一。该文研究和设计了以高频开关电源技术为基础的高效率、大功率磁控稳压电源。文中介绍了主电路、控制电路的原理设计，用Matlab仿真软件搭建了电路模型，并进行了仿真实验，在此基础上完成了硬件电路、软件程序设计。通过AT89 C51单片机实现了在不同工作方式下电源输出电压和电流的调节。实际应用证明该电源具有恒流控制效果好，可靠性高，工作稳定等优点。
자공천사진공도막기술여전통적화학전도기술상비，구유배보、강모、감배등우점，자공전원시저충도막장치적관건부건지일。해문연구화설계료이고빈개관전원기술위기출적고효솔、대공솔자공은압전원。문중개소료주전로、공제전로적원리설계，용Matlab방진연건탑건료전로모형，병진행료방진실험，재차기출상완성료경건전로、연건정서설계。통과AT89 C51단편궤실현료재불동공작방식하전원수출전압화전류적조절。실제응용증명해전원구유항류공제효과호，가고성고，공작은정등우점。
Vacuum magnetron sputtering film coating technology has the advantages of environmental protection, reducing energy consumption, and emission reduction as compared with the traditional chemicalplating technology.Magnetron power supply is one of the most important components for this kind ofcoating devices.Magnetron regulated power supply with high power and high efficiency is studied and de -signed on the basis of high -frequency switching power supply technology .The principle of main circuitand control circuit design are introduced.A simulating model is composed with Matlab to study the parametersand the waveforms of the designed circuits.The hardware circuit and the software program aredesigned on the basis of simulation results.The adjustment and display of the output voltage and the out -put current of the power supply under different work modes are achieved with AT 89C51 single chip microcomputersystem.Practical applications confirm that the designed power supply has good constant currentcontrol effect, high reliability, work stability etc.